3D integrated device architecture for hybrid superconductor-semiconductor quantum dot devices

ORAL

Abstract

Low internal losses in superconducting resonators require optimized fabrication that was developed in the framework of superconducting qubits. Semiconductor spin-qubit experiments in hybrid super-semi cQED involve semiconducting substrates, gate-oxides, dopants or even micromagnets, which may not be compatible with conventional resonator fabrication leading to higher internal losses. Here we present a 3D integrated super-semi architecture with the superconducting resonator chip fabricated in an environment optimized for superconducting qubits and then flip-chip bonded onto a spin-qubit chip fabricated in its own dedicated facility. Compared to previous cQED experiments with semiconductor spins, we demonstrate reduced photon losses in the few-photon regime and with Al gate-electrodes connected to the resonator. Using a perforated ground plane, we achieve Q=74k at an in-plane magnetic field of 100 mT, which is required for spin-photon coupling.

*Sponsored by ARO (W911NF-15-1-014), and the Gordon and Betty Moore Foundation's EPiQS Initiative (GBMF4535), and NSF (DMR-1409556). The devices were fabricated at MIT Lincoln Laboratories and the Princeton University Quantum Device Nanofabrication Laboratory. We acknowledge helpful discussion with Joe Kerckhoff from HRL Laboratories, LLC.

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Presenters

  • Felix Julian Schupp

    • Physics, Princeton University

Authors

  • Felix Julian Schupp

    • Physics, Princeton University

  • Xanthe Croot

    • Physics, Princeton University
    • Princeton University

  • Felix Borjans

    • Physics, Princeton University
    • Princeton University

  • Xiao Mi

    • Google LLC
    • Physics, Princeton University
    • Princeton University
    • Google

  • Danna Rosenberg

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab
    • MIT Lincoln Laboratories
    • Massachusetts Institute of Technology

  • Rabindra Das

    • MIT Lincoln Laboratory
    • MIT Lincoln Laboratories

  • David K Kim

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab
    • MIT-Lincoln Lab
    • MIT Lincoln Laboratories
    • Lincoln Laboratory, Massachusetts Institute of Technology (MIT)
    • Massachusetts Institute of Technology (MIT) Lincoln Laboratory

  • Alexander Melville

    • MIT Lincoln Laboratory
    • MIT Lincoln Lab
    • MIT Lincoln Laboratories
    • Massachusetts Institute of Technology (MIT) Lincoln Laboratory

  • William Oliver

    • Research Laboratory of Electronics, Department of Electrical Engineering and Computer Science, Department of Physics, MIT Lincoln Laboratory, Massachusetts Institute of Techn
    • MIT Lincoln Lab
    • MIT Lincoln Laboratory
    • MIT Lincoln Laboratory, Massachusetts Institute of Technology
    • Department of Physics, Department of Electrical Engineering and Computer Science, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Institute of Technology
    • Research Laboratory of Electronics, Massachusetts Institute of Technology MIT
    • Massachusetts Institute of Technology MIT
    • Department of Electrical Engineering and Computer Science, Department of Physics, Massachusetts Institute of Technology; MIT Lincoln Laboratory
    • Department of Electrical Engineering and Computer Science, Department of Physics, MIT Lincoln Laboratory, Massachusetts Institute of Technology
    • Massachusetts Institute of Technology
    • Research Laboratory of Electronics, Massachusetts Institute of Technology
    • Research Laboratory of Electronics, Department of Electrical Engineering & Computer Science, Department of Physics, Massachusetts Institute of Technology and MIT Lincoln Labo
    • Physics, MIT
    • MIT-Lincoln Lab
    • MIT Lincoln Laboratories
    • Research Laboratory of Electronics, Department of Physics, Department of Electrical Engineering and Computer Science, Lincoln Laboratory, Massachusetts Institute of Technolog

  • Jason Petta

    • Physics, Princeton University
    • Princeton University
    • Department of Physics, Princeton University, Princeton, New Jersey 08544, USA