Self-directed Self-assembly of Block Copolymers

Directed self-assembly (DSA) of block copolymers (BCP) provides a powerful tool to fabricate complex thin film structures at small length scale. Despite its success in fabricating various 2D patterns, fabrication of complex 3D nanostructures remains a challenge. Here, we introduce a novel method, which enables self-directed self-assembly of 3D tailored nanostructures. Dissipative particle dynamics (DPD) is employed, which demonstrates that uniform multilayer nanostructures could be obtained through stacking two different block copolymers alternatively. By introducing graphoepitaxy or chemoepitaxy to the first layer and performing multilayer stacking, information propagates upwards. Different complex bilayer and trilayer structures have been achieved through carefully choosing the BCP used in each stacking layer. We will show several examples of the complex uniform multilayer structures.