Spatially-Resolved Layer, Interface and Dopant Profiling Using Tabletop Coherent EUV Beams

ORAL

Abstract

Next-generation devices, nanomaterials, quantum and magnetic materials necessarily have increasingly complex layers, dopants and 3D structures. As a result, non-destructive techniques that can image through visibly opaque layers with sensitivity to layer and interfacial composition are critical for synthesizing and optimizing these systems. We present a tabletop complex-imaging reflectometer illuminated by coherent high harmonic extreme ultraviolet (EUV) beams. Unlike most reflectometers that transversely average quantities such as film thicknesses over the sample, our reflectometer can attain diffraction-limited spatial resolution with high sensitivity to material composition by using coherent diffractive imaging (CDI). Our complex imaging reflectometer uses grazing-incidence CDI to generate high-resolution, high-fidelity phase and amplitude images of a sample at many incidence angles. The phase images are extremely sensitive to composition, allowing us to extract a 3D map of the sample. We demonstrate the ability to very sensitively probe diffusion at buried interfaces, layer thickness and dopant profiles in a non-destructive and spatially resolved manner, distinguishing our technique from others such as SIMS, Auger sputtering, or electron imaging.

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Presenters

  • Yuka Esashi

    • University of Colorado, Boulder

Authors

  • Yuka Esashi

    • University of Colorado, Boulder

  • Michael Tanksalvala

    • University of Colorado, Boulder

  • Christina L. Porter

    • University of Colorado, Boulder

  • Bin Wang

    • University of Colorado, Boulder

  • Nicholas W. Jenkins

    • University of Colorado, Boulder

  • Zhe Zhang

    • University of Colorado, Boulder

  • Matthew N. Jacobs

    • University of Colorado, Boulder

  • Galen P. Miley

    • Northwestern University

  • Naoto Horiguchi

    • imec

  • Jihan Zhou

    • University of California, Los Angeles

  • Robert M Karl

    • JILA, University of Colorado Boulder
    • JILA
    • University of Colorado, Boulder

  • Charles Bevis

    • JILA, University of Colorado Boulder
    • University of Colorado, Boulder
    • JILA, University of Colorado, Boulder

  • Peter Johnsen

    • JILA, University of Colorado Boulder
    • Department of Physics and JILA, University of Colorado, Boulder
    • University of Colorado, Boulder

  • Joshua Knobloch

    • STROBE and JILA, University of Colorado, Boulder
    • STROBE and JILA, University of Colorado and NIST
    • University of Colorado, Boulder

  • Seth L. Cousin

    • KMLabs

  • Emma Cating

    • University of Colorado, Boulder

  • Michaël Hemmer

    • University of Colorado, Boulder

  • Chen-Ting Liao

    • JILA, University of Colorado Boulder
    • Physics, JILA/University of Colorado Boulder
    • University of Colorado, Boulder
    • JILA, University of Colorado, Boulder

  • Michael Gerrity

    • Physics and JILA, CU Boulder
    • University of Colorado, Boulder

  • Henry Kapteyn

    • JILA, University of Colorado Boulder
    • Department of Physics and JILA, University of Colorado, Boulder
    • STROBE and JILA, University of Colorado, Boulder
    • JILA and Department of Physics, University of Colorado, Boulder
    • STROBE and JILA, University of Colorado and NIST
    • Physics, JILA/University of Colorado Boulder
    • JILA
    • University of Colorado, Boulder
    • Physics and JILA, CU Boulder
    • JILA, University of Colorado, Boulder

  • Margaret Murnane

    • JILA, University of Colorado Boulder
    • Department of Physics and JILA, University of Colorado, Boulder
    • STROBE and JILA, University of Colorado, Boulder
    • STROBE and JILA, University of Colorado and NIST
    • JILA
    • University of Colorado, Boulder
    • Physics and JILA, CU Boulder
    • University of Colorado
    • JILA, University of Colorado, Boulder