Top-down nanopatterning of layered transition metal dichalcogenide heterostructures

ORAL

Abstract

Nanostructured materials give rise to useful features such as size-dependent properties, interfacial phenomena, and edge effects, allowing optimization for opto-electronics. Although electron beam lithography has been widely used for top-down fabrication of nanostructures, translating this approach to the emerging class of 2D materials has challenges. Direct electron beam exposure on 2D materials can lead to non-reversible damage and degradation of optical and electronic properties. We show that e-beam damage can be significantly reduced on monolayer transition metal dichalcogenides by covering it with a thin hexagonal boron nitride layer. The reduced damage allows direct negative resist lithographic writing of sub-10nm nanostructure fabrication without impairing the monolayer optical and electrical properties.

*Work supported by the Office of Naval Research (N00014-16-1-3055).
Use of the Center for Nanoscale Materials, an Office of Science user facility, was supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357.

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Presenters

  • Pufan Liu

    • Northwestern University

Authors

  • Pufan Liu

    • Northwestern University

  • Teodor Stanev

    • Northwestern University

  • Kenji Watanabe

    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305 0044, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Materials Science
    • Advanced Materials Laboratory, National Institute for Materials Science, , 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Material Science, 1-1 Namiki, Tsukuba 305-0044
    • National Institute of Materials Science
    • NIMS, Japan
    • Advanced Materials Laboratory, NIMS
    • National Institute for Materials Science, Tsukuba, Japan
    • National Institute for Materials Science, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0044, Japan
    • National Institute for Materials Science (NIMS)
    • NIMS Tsukuba
    • National Institute for Materials Science (Japan)
    • NIMS
    • National Institute for Material Science
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, Japan
    • National Institute for Materials Science , Japan
    • National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan.
    • Advanced Materials Laboratory, National Institute for Materials Science, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
    • National Institute for Materials Science, Tsukuba, Ibaraki 305- 0044, Japan
    • National Institute for Material Science - Japan
    • National Institute for Materials Science, Namiki Tsukuba Ibaraki, Japan
    • National Institute of Material Science
    • Advanced Material Lab, NIMS
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki, Japan
    • National Institute for Materials Science, Tsukuba
    • 1-1 Namiki, Tsukuba, National Institute for Materials Science
    • NIMS/Tsukuba
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044 Japan
    • National Institute for Materials Science, Namiki, 305-0044, Japan
    • National Institute for Material Science, Japan
    • Advanced Materials Laboratory, NIMS, Japan
    • Columbia University
    • Advanced Materials Labaratory, National Institute for Materials Science
    • National Institute of Material Science, 1-1 Namiki, Tsukuba, Ibaraki 205-0044, Japan
    • National Institute of Materials Science, Japan

  • Takashi Taniguchi

    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305 0044, Japan
    • National Institute for Materials Science
    • Advanced Materials Laboratory, National Institute for Materials Science, , 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Material Science, 1-1 Namiki, Tsukuba 305-0044
    • National Institute of Materials Science
    • NIMS, Japan
    • Advanced Materials Laboratory, NIMS
    • National Institute for Materials Science, Tsukuba, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0044, Japan
    • National Institute for Materials Science (NIMS)
    • NIMS Tsukuba
    • NIMS
    • National Institute for Material Science
    • National Institute for Materials Science, Japan
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, Japan
    • National Institute for Materials Science , Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
    • National Institute for Materials Science, Tsukuba, Ibaraki 305- 0044, Japan
    • National Institute for Material Science - Japan
    • National Institute for Materials Science, Namiki Tsukuba Ibaraki, Japan
    • National Institute of Material Science
    • Advanced Material Lab, NIMS
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki, Japan
    • National Institute for Materials Science, Tsukuba
    • 1-1 Namiki, Tsukuba, National Institute for Materials Science
    • NIMS/Tsukuba
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044 Japan
    • National Institute for Materials Science, Namiki, 305-0044, Japan
    • National Institute for Material Science, Japan
    • Advanced Materials Laboratory, NIMS, Japan
    • Advanced Materials Labaratory, National Institute for Materials Science
    • National Institute of Material Science, 1-1 Namiki, Tsukuba, Ibaraki 205-0044, Japan
    • National Institute of Materials Science, Japan

  • Nathaniel Stern

    • Northwestern University
    • Physics and Astronomy, Northwestern University
    • Physics and Astronomy, Northwestern University, Evanston, IL, United States