Direct reversible writing of nanoscale doping patterns in van der Waals heterostructures

ORAL

Abstract

Spatially controlled modification of charge density is essential to explore exotic physics and enable new device applications. Conventionally, this has been achieved using lithographically defined local gates or by employing molecular self-assemblies on surfaces. However, these methods face limitations in applications necessitating spatial re-writability and complex circuit designs. Recent progress has demonstrated alternative ways to induce rewritable doping patterns in van der Waals (vdW) heterostructures without complex processing masks or resist by optical illumination or applying an STM tip voltage pulse. In this work we introduce a more flexible electron beam doping technique to induce controllable and erasable doping effect in (vdW) heterostructures. With this new doping technique, we can accumulate high carrier density and reversibly write complex doping patterns with nanoscale spatial resolution while preserving the high quality of the vdW heterostructures. The technique can be an ideal approach to study a variety of superlattice physics in vdW heterostructures and to create on-demand circuits for device applications.

*This work was supported in part by the U.S. Department of Energy under Contract No. DE-AC02-05-CH11231, within the sp2-Bonded Materials Program (KC2207).

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Presenters

  • Wu Shi

    • Lawrence Berkeley National Laboratory and UC Berkeley

Authors

  • Wu Shi

    • Lawrence Berkeley National Laboratory and UC Berkeley

  • Salman Kahn

    • Lawrence Berkeley National Laboratory and UC Berkeley

  • Lili Jiang

    • Physics, UC Berkeley
    • UC Berkeley

  • Sheng-yu Wang

    • UC Berkeley

  • Hsin-Zon Tsai

    • University of California, Berkeley
    • UC Berkeley

  • Dillon Wong

    • Princeton University

  • Takashi Taniguchi

    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305 0044, Japan
    • National Institute for Materials Science
    • Advanced Materials Laboratory, National Institute for Materials Science, , 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Material Science, 1-1 Namiki, Tsukuba 305-0044
    • National Institute of Materials Science
    • NIMS, Japan
    • Advanced Materials Laboratory, NIMS
    • National Institute for Materials Science, Tsukuba, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0044, Japan
    • National Institute for Materials Science (NIMS)
    • NIMS Tsukuba
    • NIMS
    • National Institute for Material Science
    • National Institute for Materials Science, Japan
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, Japan
    • National Institute for Materials Science , Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
    • National Institute for Materials Science, Tsukuba, Ibaraki 305- 0044, Japan
    • National Institute for Material Science - Japan
    • National Institute for Materials Science, Namiki Tsukuba Ibaraki, Japan
    • National Institute of Material Science
    • Advanced Material Lab, NIMS
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki, Japan
    • National Institute for Materials Science, Tsukuba
    • 1-1 Namiki, Tsukuba, National Institute for Materials Science
    • NIMS/Tsukuba
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044 Japan
    • National Institute for Materials Science, Namiki, 305-0044, Japan
    • National Institute for Material Science, Japan
    • Advanced Materials Laboratory, NIMS, Japan
    • Advanced Materials Labaratory, National Institute for Materials Science
    • National Institute of Material Science, 1-1 Namiki, Tsukuba, Ibaraki 205-0044, Japan
    • National Institute of Materials Science, Japan

  • Kenji Watanabe

    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, Ibaraki 305 0044, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Materials Science
    • Advanced Materials Laboratory, National Institute for Materials Science, , 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Material Science, 1-1 Namiki, Tsukuba 305-0044
    • National Institute of Materials Science
    • NIMS, Japan
    • Advanced Materials Laboratory, NIMS
    • National Institute for Materials Science, Tsukuba, Japan
    • National Institute for Materials Science, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba 305-0044, Japan
    • National Institute for Materials Science, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0044, Japan
    • National Institute for Materials Science (NIMS)
    • NIMS Tsukuba
    • National Institute for Materials Science (Japan)
    • NIMS
    • National Institute for Material Science
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, Japan
    • National Institute for Materials Science , Japan
    • National Institute for Materials Science, Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan.
    • Advanced Materials Laboratory, National Institute for Materials Science, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
    • National Institute for Materials Science, Tsukuba, Ibaraki 305- 0044, Japan
    • National Institute for Material Science - Japan
    • National Institute for Materials Science, Namiki Tsukuba Ibaraki, Japan
    • National Institute of Material Science
    • Advanced Material Lab, NIMS
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Japan
    • Advanced Materials Laboratory, National Institute for Materials Science, Tsukuba, Ibaraki, Japan
    • National Institute for Materials Science, Tsukuba
    • 1-1 Namiki, Tsukuba, National Institute for Materials Science
    • NIMS/Tsukuba
    • National Institute for Materials Science, 1-1 Namiki, Tsukuba, 305-0044 Japan
    • National Institute for Materials Science, Namiki, 305-0044, Japan
    • National Institute for Material Science, Japan
    • Advanced Materials Laboratory, NIMS, Japan
    • Columbia University
    • Advanced Materials Labaratory, National Institute for Materials Science
    • National Institute of Material Science, 1-1 Namiki, Tsukuba, Ibaraki 205-0044, Japan
    • National Institute of Materials Science, Japan

  • Feng Wang

    • University of California - Berkeley
    • University of California, Berkeley
    • Physics, UC Berkeley
    • Department of Physics, University of California at Berkeley, Berkeley, CA 94709, USA
    • University of California at Berkeley
    • Lawrence Berkeley National Laboratory and UC Berkeley
    • UC Berkeley
    • Physics, University of California, Berkeley

  • Michael F Crommie

    • Physics, UC Berkeley
    • University of California, Berkeley
    • Lawrence Berkeley National Laboratory and UC Berkeley
    • Department of Physics, University of California at Berkeley
    • Physics, University of California - Berkeley

  • Alex Zettl

    • Lawrence Berkeley National Laboratory and UC Berkeley
    • University of California, Berkeley