STM written nano-device and 2DEG measurements using pre-implanted contacts

ORAL

Abstract

A streamlined method is used to contact and measure either nano-devices written using STM hydrogen resist lithography dosed with phosphine or surface gated MOSFET (metal-oxide semiconductor field effect transistors) using heavily doped implant regions made before any device fabrication. This process inversion allows the elimination of electron beam lithography for contacting and allow a greater fraction of processing to occur at the wafer scale, as opposed to the chip scale. The process method and results from both STM written nano-devices and MOSFETs showing good contact integrity will be discussed.

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Presenters

  • Joshua Pomeroy

    • NIST -Natl Inst of Stds & Tech
    • National Institute of Standards and Technology
    • National Institue of Standard and Technology

Authors

  • Joshua Pomeroy

    • NIST -Natl Inst of Stds & Tech
    • National Institute of Standards and Technology
    • National Institue of Standard and Technology

  • Aruna Ramanayaka

    • NIST -Natl Inst of Stds & Tech
    • National Institute of Standards and Technology
    • Univ of Maryland-College Park

  • Ke Tang

    • NIST -Natl Inst of Stds & Tech
    • National Institute of Standards and Technology

  • Xiqiao Wang

    • NIST -Natl Inst of Stds & Tech
    • University of Maryland

  • Hyun-soo Kim

    • NIST -Natl Inst of Stds & Tech
    • National Institute of Standards and Technology

  • Joseph Hagmann

    • National Institute of Standards and Technology
    • NIST -Natl Inst of Stds & Tech

  • Roy Murray

    • National Institute of Standards and Technology
    • NIST -Natl Inst of Stds & Tech

  • Scott Schmucker

    • National Institute of Standards and Technology
    • NIST -Natl Inst of Stds & Tech
    • NIST

  • Curt Richter

    • National Institute of Standards and Technology
    • NIST -Natl Inst of Stds & Tech
    • NIST - National Inst. of Stands & Tech

  • Rick Silver

    • NIST -Natl Inst of Stds & Tech

  • Michael Stewart

    • National Institute of Standards and Technology
    • NIST -Natl Inst of Stds & Tech

  • Neil Zimmerman

    • National Institute of Standards and Technology
    • NIST -Natl Inst of Stds & Tech
    • National Institue of Standard and Technology