High-Mobility CVD-Grown Graphene Device Fabrication with Perfluoropolymers

ORAL

Abstract

The transfer of graphene grown by chemical vapor deposition (CVD) using amorphous polymers represents a widely implemented method for graphene-based electronic device fabrication. However, the most commonly used polymer, poly(methyl methacrylate) (PMMA), leaves a residue on the graphene that limits the mobility. Here we report a method for graphene transfer and patterning that employs a perfluoropolymer—Hyflon—as a transfer handle and to protect the graphene against contamination from photoresists or other polymers. CVD-grown graphene transferred this way onto LaAlO3/SrTiO3 heterostructures is atomically clean, with high mobility (~30,000 cm2V−1s−1) near the Dirac point at 2 K and clear, quantized Hall and magnetoresistance. Local control of the LaAlO3/SrTiO3 interfacial metal-insulator transition—through the graphene—is preserved with this transfer method. The use of perfluoropolymers, such as Hyflon, with CVD-grown graphene and other 2D materials can readily be implemented with other polymers or photoresists.

*We gratefully acknowledge the support by N00014-16-1-3152 (JL, BD), and N00014-15-1-2847 (JL). The work at University of Wisconsin-Madison was supported by the National Science Foundation under DMREF Grant No. DMR-1629270, AFOSR FA9550-15-1-0334 and AOARD FA2386-15-1-4046.

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Presenters

  • Jianan Li

    • Univ of Pittsburgh
    • University of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh

Authors

  • Jianan Li

    • Univ of Pittsburgh
    • University of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh

  • Jen-Feng Hsu

    • Univ of Pittsburgh
    • University of Pittsburgh
    • Physics, University of Pittsburgh

  • Hyungwoo Lee

    • University of Wisconsin-Madison
    • Univ of Wisconsin-Madison
    • University of Wisconsin
    • University of Wisconsin–Madison
    • Department of Materials Science and Engineering, University of Wisconsin-Madison
    • Physics, University of Wisconsin–Madison
    • Department of Materials Science and Engineering, University of Wisconsin - Madison

  • Shivendra Tripathi

    • Univ of Pittsburgh

  • Qing Guo

    • Univ of Pittsburgh
    • Physics, University of Pittsburgh

  • Lu Chen

    • Univ of Pittsburgh
    • University of Pittsburgh
    • Physics, University of Pittsburgh

  • Mengchen Huang

    • Univ of California, Santa Barbara
    • Department of Physics and Astronomy, University of Pittsburgh
    • Physics, University of California, Santa Barbara

  • Shonali Dhingra

    • Univ of California, Los Angeles

  • Jung-Woo Lee

    • Univ of Wisconsin-Madison
    • University of Wisconsin-Madison
    • University of Wisconsin
    • University of Wisconsin–Madison
    • Physics, University of Wisconsin–Madison
    • Department of Materials Science and Engineering, University of Wisconsin-Madison

  • Chang-Beom Eom

    • University of Wisconsin-Madison
    • Univ of Wisconsin-Madison
    • Univ of Wisconsin, Madison
    • Department of Material Science and Engineering, University of Wisconsin-Madison
    • Matls Sci & Eng, University of Wisconsin-Madison
    • University of Wisconsin
    • Department of Materials Science and Engineering, University of Wisconsin-Madison
    • University of Wisconsin–Madison
    • MS&E, University of Wisconsin
    • Physics, University of Wisconsin–Madison
    • Department of Materials Science and Engineering, University of Wisconsin - Madison

  • Patrick Irvin

    • Univ of Pittsburgh
    • University of Pittsburgh
    • Physics and Astronomy, University of Pittsburgh
    • Department of Physics and Astronomy, Univ of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh
    • Physics, University of Pittsburgh
    • Physics and Astronomy, Univ of Pittsburgh

  • Jeremy Levy

    • Univ of Pittsburgh
    • Physics, Univ of Pittsburgh
    • University of Pittsburgh
    • Physics and Astronomy, University of Pittsburgh
    • Department of Physics and Astronomy, Univ of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh
    • Physics, University of Pittsburgh
    • Physics and Astronomy, Univ of Pittsburgh

  • Brian D'Urso

    • Montana State University
    • Physics, University of Montana