A Route to Atomically Precise Hexagonal Boron Nitride Nanopores

ORAL

Abstract

In this presentation, we discuss the fabrication of individual nanopores in hexagonal boron nitride (h-BN) with atomically precise control of the pore shape and size using only a conventional TEM. By careful tuning of the beam conditions, we show that individual perfect triangular pores are fabricated in h-BN and their size can be controlled with near-atomic precision. While much progress has been made, most previous methods of pore production in other 2D materials still typically create pores with irregular geometry and imprecise diameters. In contrast, other studies have shown that with careful control of electron irradiation, defects in h-BN grow with pristine zig-zag edges at quantized triangular sizes, but they have never before demonstrated production and control of isolated defects. In this work, we combine these techniques to yield a method in which we can create and control individual size-quantized triangular nanopores through multilayer h-BN sheets.

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Presenters

  • Stephen Gilbert

    • Physics, Univ of California - Berkeley
    • Univ of California - Berkeley
    • Physics, University of California - Berkeley
    • Physics, University of California, Berkeley

Authors

  • Stephen Gilbert

    • Physics, Univ of California - Berkeley
    • Univ of California - Berkeley
    • Physics, University of California - Berkeley
    • Physics, University of California, Berkeley

  • Gabriel Dunn

    • Physics, University of California - Berkeley

  • Amin Azizi

    • Physics, University of California - Berkeley

  • Thang Pham

    • Univ of California - Berkeley
    • Materials Science and Engineering, University of California - Berkeley
    • Physics, University of California at Berkeley

  • Brian Shevitski

    • Physics, University of California - Berkeley

  • Stanley Liu

    • Univ of California - Berkeley
    • Physics, University of California - Berkeley

  • Shaul Aloni

    • Lawrence Berkeley National Lab
    • Lawrence Berkeley National Laboratory
    • Molecular Foundry, Lawrence Berkeley National Laboratory
    • Molecular Foundry, Lawrence Berkeley National Lab

  • Alex Zettl

    • UC Berkeley and LBNL
    • UC berkeley
    • Univ of California - Berkeley
    • Physics, UC Berkeley
    • Physics, University of California, Berkeley
    • University of California at Berkeley
    • Physics, University of California - Berkeley
    • Department of Physics, Univ of California - Berkeley