Semiconductor Processing and Devices for Application
ORAL · H28 ·
Presentations
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Fabrication of Quench Condensed Thin Films Using an Integrated MEMS Fab on a Chip
ORAL
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Authors
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Richard Lally
- Boston University
- Boston Univ
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Jeremy Reeves
- Boston University
- Boston Univ
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Thomas Stark
- Boston University
- Boston Univ
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Lawrence Barrett
- Division of Material Science & Engineering, Boston University
- Boston Univ
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David Bishop
- Boston University
- Boston Univ
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A MEMS Based Stencil Lithography Approach to Nanomanufacturing
ORAL
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Authors
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Lawrence Barrett
- Division of Material Science & Engineering, Boston University
- Boston Univ
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Thomas Stark
- Division of Material Science & Engineering, Boston University
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Jeremy Reeves
- Department of Electrical & Computer Engineering, Boston University
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Richard Lally
- Division of Material Science & Engineering, Boston University
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David Bishop
- Division of Material Science & Engineering, Boston University
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Wide actuation range cavity resonators based on MEMS
ORAL
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Authors
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Michael J. Burns
- Boston College
- Department of Physics, Boston College, Chestnut Hill, Massachusetts 02467, USA.
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Michael J. Burns
- Boston College
- Department of Physics, Boston College, Chestnut Hill, Massachusetts 02467, USA.
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Luke D'Imperio
- Boston College
- Department of Physics, Boston College, Chestnut Hill, Massachusetts 02467, USA.
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M. J. Naughton
- Boston College
- Department of Physics, Boston College, Chestnut Hill, Massachusetts 02467, USA.
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Si nanostructures induced by ion-beam impact on SiO$_{\mathrm{2}}$
ORAL
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Authors
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Camilla Ferreira de Sa Codeco
- Universidade Federal do Rio de Janeiro
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Sergio L.A. Mello
- Universidade Federal de Vicosa
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Germano M. Penello
- Universidade do Estado do Rio de Janeiro
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Antonio C. F. Santos
- Universidade Federal do Rio de Janeiro
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Marcelo M. Sant'Anna
- Universidade Federal do Rio de Janeiro
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Krishynan S. F. M. Araujo
- Universidade Federal do Rio de Janeiro
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Nonlinear Laser Lithography implementation for both ``normal'' and ``anomalous'' laser induced periodic structuring.
ORAL
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Authors
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Ihor Pavlov
- Bilkent University
- Bilkent Univ
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Onur Tokel
- Bilkent University
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Ozgun Yavuz
- Bilkent University
- Bilkent Univ
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Ghaith Makey
- Bilkent University
- Bilkent Univ
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Omer Ilday
- Bilkent University
- Bilkent Univ
- Department of Physics, Bilkent University, 06800 Ankara, Turkey
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Monolithically integrated microfluidic channels in silicon for chip cooling
ORAL
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Authors
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Ahmet Turnali
- Bilkent University
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Onur Tokel
- Bilkent University
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Tahir Colakoglu
- Middle East Technical University
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Mona Zolfaghari
- Middle East Technical University
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Ihor Pavlov
- Bilkent University
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Alpan Bek
- Middle East Technical University
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Rasit Turan
- Middle East Technical University
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Fatih Omer Ilday
- Bilkent University
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Laser slicing of silicon wafers
ORAL
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Authors
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Onur Tokel
- Bilkent University
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Ahmed Turnali
- Bilkent University
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Tahir Colakoglu
- Middle East Technical University
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Ihor Pavlov
- Bilkent University
- Bilkent Univ
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Mona Zolfaghari Borra
- Middle East Technical University
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Ghaith Makey
- Bilkent University
- Bilkent Univ
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Alpan Bek
- Middle East Technical University
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Raşit Turan
- Middle East Technical University
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Omer Ilday
- Bilkent University
- Bilkent Univ
- Department of Physics, Bilkent University, 06800 Ankara, Turkey
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Strategies for alignment and e-beam contact to buried atomic-precision devices in Si
ORAL
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Authors
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Jonathan Wyrick
- National Institute of Standards and Technology
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Pradeep Namboodiri
- National Institute of Standards and Technology
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Xiqiao Wang
- National Institute of Standards and Technology
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Roy Murray
- National Institute of Standards and Technology
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Joseph Hagmann
- National Institute of Standards and Technology
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Kai Li
- National Institute of Standards and Technology
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Michael Stewart
- National Institute of Standards and Technology
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Curt Richter
- National Institute of Standards and Technology
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Richard Silver
- National Institute of Standards and Technology
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Characterization of reactive magnetron sputtering plasma during thin film deposition.
ORAL
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Authors
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Rylan Gordon
- Department of Chemistry, Physics and Astronomy, Georgia College & State University
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Hasitha Mahabaduge
- Georgia College & State University
- Department of Chemistry, Physics and Astronomy, Georgia College & State University
- Department of Chemistry, Physics and Astronomy, Georgia College & State University,
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Domain-confined growth of hollow semiconductor nanocrystals indcued by an electron beam
ORAL
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Authors
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Luping Tang
- Southeast University
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Longbing He
- Southeast University
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Litao Sun
- Southeast University
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Magnetometry with Quartz Tuning Fork
ORAL
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Authors
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Lu Chen
- Department of Physics, University of Michigan, Ann Arbor, 450 Church Street, Ann Arbor, MI 48109
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Fan Yu
- University of Michigan
- Univ of Michigan - Ann Arbor
- Department of Physics, University of Michigan, Ann Arbor, 450 Church Street, Ann Arbor, MI 48109
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Ziji Xiang
- University of Michigan
- Univ of Michigan - Ann Arbor
- Department of Physics, University of Michigan, Ann Arbor, 450 Church Street, Ann Arbor, MI 48109
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Lu Chen
- Department of Physics, University of Michigan, Ann Arbor, 450 Church Street, Ann Arbor, MI 48109
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Tomo Asaba
- Univ. of Michigan
- Univ of Michigan - Ann Arbor
- Department of Physics, University of Michigan, Ann Arbor, 450 Church Street, Ann Arbor, MI 48109
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Benjamin Lawson
- Univ of Michigan - Ann Arbor
- Department of Physics, University of Michigan, Ann Arbor, 450 Church Street, Ann Arbor, MI 48109
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Weida Wu
- Department of Physics and Astronomy, Rutgers University, 136 Frelinghuysen Road, Piscataway, NJ 08854-8019
- Rutgers Univ
- Department of Physics and Astronomy, Rutgers University
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Lu Li
- University of Michigan
- Univ of Michigan - Ann Arbor
- Department of Physics, University of Michigan, Ann Arbor, 450 Church Street, Ann Arbor, MI 48109
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Influence of self-ordered Au nanoparticles on chemically textured Si surfaces with improved antireflection and hydrophobicity.
ORAL
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Authors
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Chetan Saini
- Shiv Nadar University
- PhD student
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Arabinda Barman
- Shiv Nadar University
- PhD student
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Mohit Kumar
- Research Associate
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B. Satpati
- Scientist G
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T. Som
- Professor
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Aloke Kanjilal
- Shiv Nadar University
- Professor
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Film-Wafer Bonding for Thermal Studies of a Twist Si Grain Boundar
ORAL
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Authors
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Dongchao Xu
- Univ of Arizona
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Bo Xiao
- Univ of Arizona
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hongbo zhao
- Univ of Arizona
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qing hao
- Univ of Arizona
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Study of Damage and Recovery of Electron Irradiated Polyimide using EPR and NMR Spectroscopy
ORAL
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Authors
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Sunita Humagain
- The Graduate Center, CUNY and Hunter College, CUNY
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Jessica Jhonson
- Hunter College, CUNY
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Phillip Stallworth
- Hunter College, CUNY
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Daniel Engelhart
- National Research Council at Air Force Research Lab, USA
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Elena Plis
- Assurance Technology Corporation, USA
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Dale Ferguson
- Air Force Research Lab, Space Vehicles Division, USA
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Russell Cooper
- Air Force Research Lab, Space Vehicles Division, USA
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Ryan Hoffmann
- Air Force Research Lab, Space Vehicles Division, USA
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Steve Greenbaum
- The Graduate Center, CUNY and Hunter College, CUNY
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