Lift-Off Processing and Aluminum on Silicon Superconducting Circuit Coherence
ORAL
Abstract
Dielctric loss from two level states (TLS's) are a limiting decoherence method in planar superconducting qubits. Previously we have shown that liftoff deposited metal has more loss than etched devices. Current fabrication techniques of Xmon qubit devices limit this loss by using liftoff metal on only a small area of the transmon including the Josephson junctions. However this method leads to excess loss when used on a silicon substrate. I have used quality factor measurments of coplanar waveguide resonator circuits as a tool to measure isolated steps in the liftoff processes. I will report on the effects of these steps and their added loss.
*This research was funded by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA), through the Army Research Office grant JMAR-05.
