Parallelization of Thermochemical Nanolithography
ORAL
Abstract
One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. We demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of luminescent polymer nanostructures and graphene-based nanoribbons.
*This work has been supported by the National Science Foundation PHYS 0848797 (J.E.C.), CMMI 1100290 (E.R., W.P.K), MRSEC program DMR 0820382 (E.R., J.E.C.), and the Office of Basic Energy Sciences DOE DE-FG02-06ER46293 (E.R.).
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