Near-surface effects of transient oxidation and reduction on Nb-doped SrTiO3 epitaxial thin films

ORAL

Abstract

We studied the effects of transient oxidation and reduction of Nb-doped epitaxial thin films through variations of PAr and PO2. The samples were prepared by co-sputtering of Nb and SrTiO3 on LaAlO3 substrates. The Nb-content were varied from 0-33.7\%, as determined by PIXE. Contact resistance, sheet resistance, and optical properties are used to discriminate the effects.

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Authors

  • C.F. Chang

    • National Sun Yat-Sen University, Taiwan

  • Q.Y. Chen

    • National Sun Yat-Sen University, Taiwan, University of Houston, USA

  • P.V. Wadekar

    • University of Liverpool, UK

  • O. Lozano

    • University of Namur, Belgium

  • M.S. Wong

    • National Dong Hwa University, Taiwan

  • W.C. Hsieh

    • National Sun Yat-Sen University, Taiwan

  • W.Y. Lin

    • National Sun Yat-Sen University, Taiwan

  • H.H. Ko

    • National Sun Yat-Sen University, Taiwan

  • Q.J. Lin

    • National Sun Yat-Sen University, Taiwan

  • H.C. Huang

    • National Sun Yat-Sen University, Taiwan

  • N.J. Ho

    • National Sun Yat-Sen University, Taiwan

  • L.W. Tu

    • National Sun Yat-Sen University, Taiwan

  • H.H. Liao

    • Enli Tech., Taiwan

  • P.V. Chinta

    • University of Vermont and BNL, USA

  • W.K. Chu

    • University of Houston, USA

  • H.W. Seo

    • University of Arkansas, USA