Design and construction of a cavity electro-opto-mechanical system

ORAL

Abstract

The parallel advances in the fields of electromechanics and optomechanics have raised the prospect of coupling mechanical motion to both electrical and optical fields. Such a hybrid device has many applications, including transduction of quantum information between microwave and optical frequencies. We demonstrate a cavity electro-opto-mechanical device with a mechanical resonator formed by a thin Si${}_3$N${}_4$ membrane. Partial metallization of the membrane with niobium completes a superconducting electrical circuit fabricated using a ``flip-chip'' technique. This package is integrated into a free-space high-finesse Fabry-Perot cavity, whose spatial mode interacts with the non-metallized portion of the membrane. We report on device performance and discuss future directions for design of hybrid electro-opto-mechanical devices.

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Authors

  • Robert Peterson

    • JILA: University of Colorado and NIST
    • JILA - University of Colorado and NIST, and Department of Physics, University of Colorado, Boulder

  • Reed Andrews

    • JILA - University of Colorado and NIST, and Department of Physics, University of Colorado, Boulder

  • Thomas Purdy

    • JILA - University of Colorado and NIST, and Department of Physics, University of Colorado, Boulder

  • Katarina Cicak

    • National Institute of Standards and Technology, Boulder, Colorado

  • Raymond Simmonds

    • National Institute of Standards and Technology, Boulder, Colorado

  • Cindy Regal

    • JILA - University of Colorado and NIST, and Department of Physics, University of Colorado, Boulder

  • Konrad Lehnert

    • JILA - University of Colorado and NIST, and Department of Physics, University of Colorado, Boulder