Noise study of insulating films within superconducting LC resonators

Two-level systems (TLS) in amorphous dielectrics, known to be a major source of decoherence in superconducting qubits, are also known to cause low-frequency phase noise in resonating superconducting circuits. Here we will report on an effort to characterize this noise using microwave LC resonators fabricated with a trilayer capacitor containing a deposited silicon nitride dielectric film containing TLS, sandwiched by superconducting electrodes. The resonators are probed at frequencies of approximately 6 GHz and at temperatures of 10-200 mK. The noise dependence on temperature, microwave power, and dielectric volume will be discussed in the context of standard tunneling model of two level systems and newer models.