Etch Effects on Surface loss in High Quality Aluminum on Silicon Superconducting Coplanar Resonators

ORAL

Abstract

Superconducting coplanar resonators are a powerful tool for studying capacitive loss from two level states (TLS's) in superconducting qubits. We have found evidence that standard processing of aluminum on sapphire superconducting devices leaves behind $\approx$2 nm organic residues which can contribute to loss at the Q$> 10^{6}$ level that we are presently working with. Removing these residues is possible on a silicon substrate as it allows various sidewall etchings and profilings via chemical and physical etches. I will present recent Q factor measurements of aluminum on silicon resonators that were defined through a variety of etching conditions.

*This research was funded by the Office of the Director of National Intelligence (ODNI), Intelligence Advanced Research Projects Activity (IARPA), through the Army Research Office grant JMAR-05.

–

Authors

  • Andrew Dunsworth

    • Univ of California - Santa Barbara

  • Anthony Megrant

    • Univ of California - Santa Barbara
    • UC Santa Barbara

  • R. Barends

    • Univ of California - Santa Barbara
    • UC Santa Barbara

  • Yu Chen

    • Univ of California - Santa Barbara
    • UC - Santa Barbara

  • I.-C. Hoi

    • Univ of California - Santa Barbara
    • Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, SE-412 96 Gothenburg, Sweden

  • Evan Jeffrey

    • Univ of California - Santa Barbara
    • UC Santa Barbara

  • Josh Mutus

    • Univ of California - Santa Barbara

  • Pedram Roushan

    • Univ of California - Santa Barbara
    • University of California, Santa Barbara

  • Brooks Campbell

    • Univ of California - Santa Barbara

  • Zijun Chen

    • Univ of California - Santa Barbara

  • B. Chiaro

    • Univ of California - Santa Barbara
    • UC Santa Barbara

  • J. Kelly

    • Univ of California - Santa Barbara
    • UC Santa Barbara

  • Charles Neill

    • Univ of California - Santa Barbara
    • UCSB

  • Peter O'Malley

    • Univ of California - Santa Barbara
    • University of California, Santa Barbara

  • Chris Quintana

    • UC Santa Barbara
    • Univ of California - Santa Barbara

  • Daniel Sank

    • Univ of California - Santa Barbara
    • UC Santa Barbara

  • Amit Vainsencher

    • UC Santa Barbara
    • Univ of California - Santa Barbara

  • Jim Wenner

    • Univ of California - Santa Barbara
    • University of California, Santa Barbara

  • Ted White

    • U.C. Santa Barbara
    • Univ of California - Santa Barbara

  • Andrew N. Cleland

    • UC Santa Barbara
    • Univ of California - Santa Barbara
    • UC Santa Barbara, USA

  • John Martinis

    • University of California, Santa Barbara
    • Univ of California - Santa Barbara
    • UC Santa Barbara
    • UC Santa Barbara, USA
    • Department of Physics, University of California, Santa Barbara, California 93106, USA