In-Situ Coherent Grazing Incidence Small Angle X-ray Scattering (Co-GISAXS) Studies of Surface Fluctuations of Sputter Deposited WSi$_{2}$ using X-ray Photon Correlation Spectroscopy (XPCS)

We performed Coherent Grazing Incidence Small Angle X-ray Scattering (Co-GISAXS) studies of surface dynamics during magnetron sputtering deposited WSi$_{2}$ amorphous thin films. The local dynamics of surface fluctuations was studied by X-ray Photon Correlation Spectroscopy (XPCS) in the late time regime where the static GIXAXS stops evolving. Our studies reveal that the correlation time of the sputtered species varies as a power law with the in-plane momentum transfer. The experimentally obtained results are compared with predictions from continuum models of surface growth.