Self-consistent field theory for directed self-assembly in non-cylindrical confinement

ORAL

Abstract

We use self-consistent field theory to study the directed self-assembly (DSA) of diblock copolymers under non-cylindrical pore confinement such as oval, rectangular or the like. Our goal is to understand whether block copolymers can rectify non-cylindrical holes with reduced critical dimension in both minor direction and major direction of the non-cylindrical prepatterns. We explore a wide range of prepattern shapes, polymer characteristics to optimize DSA non-cylindrical holes. We also discover defects of DSA morphologies in the non-cylindrical prepattterns.

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Authors

  • Tatsuhiro Iwama

    • Asahi Kasei E-Materials Co., University of California Santa Barbara

  • Nabil Laachi

    • University of California Santa Barbara

  • Bongkeun Kim

    • University of California Santa Barbara

  • Kris Delaney

    • University of California Santa Barbara
    • UC Santa Barbara

  • Glenn H. Fredrickson

    • University of California, Santa Barbara
    • University of California Santa Barbara
    • UC Santa Barbara