Synthesis of Ag$_{2}$O Films using RF Magnetron Sputtering

ORAL

Abstract

Silver oxide (Ag$_{2}$O) thin films were successfully grown using reactive RF magnetron sputtering onto SiO$_{2}$ and Al$_{2}$O$_{3}$ substrates at room temperature. Synthesis of these films was achieved in a gaseous mixture of oxygen and argon which was 40{\%} oxygen. X-Ray diffraction tests yielded numerous peak intensities at angles correlating directly to Ag$_{2}$O. Deposition rates were shown to be a significantly greater on Al$_{2}$O$_{3}$ in comparison to SiO$_{2}$. Understanding this difference is a point of future investigations. ASTM D3359 adhesion tests as well as four terminal conductivity tests were also performed on the films and will be reported.

Authors

  • Eric Kaiser

    • Department of Physics and Astronomy, Rowan University
  • John Bonini

    • Department of Physics and Astronomy, Rowan University
  • William Fordham

    • Department of Chemical Engineering, Rowan University
  • Matthew Long

    • Department of Physics and Astronomy, Rowan University
  • Joseph Natale

    • Department of Electrical and Computer Engineering, Rowan University
  • Sean Redmond

    • Department of Electrical and Computer Engineering, Rowan University
  • Adam Westerland

    • Department of Electrical and Computer Engineering, Rowan University
  • Michael Yanakas

    • Department of Physics and Astronomy, Rowan University
  • Xiao Hu

    • Department of Physics and Astronomy, Rowan University, Glassboro, NJ 08028, USA
    • Department of Physics and Astronomy, Rowan University
  • Samuel Lofland

    • Physics Department, Rowan University, NY
    • Rowan University Department of Physics and Astronomy
    • Department of Physics and Astronomy, Rowan University
  • Robert Krchnavek

    • Department of Electrical and Computer Engineering, Rowan University
  • Jeffrey Hettinger

    • Rowan University Department of Physics and Astronomy
    • Department of Physics and Astronomy, Rowan University