Parallel conductive-AFM lithography of LaAlO$_3$/SrTiO$_3$ using 1D multiple-tip array

ORAL

Abstract

Nanoscale devices at the LaAlO$_3$/SrTiO$_3$ interface can be created by metastable charging of the top LaAlO$_3$ surface using a voltage-biased conductive-AFM tip.\footnote{C.Cen, \textit{et al.}, \textit{Nature Materials} \textbf{7}, 298 (2008).} In order to create scalable nanoelectronic circuits, it will be important to develop a process to allow multiple tips to write nanostructures in parallel. Here we demonstrate a parallel writing scheme using a 1D multiple-tip array. Independent control over the writing process for each tip is achieved by holding the tip array at a fixed potential and varying the voltage applied to individual electrodes.

*The authors acknowledge support from NSF (DMR-1124131).

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Authors

  • Shuo Li

    • University of Pittsburgh

  • Mengchen Huang

    • University of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh

  • Feng Bi

    • University of Pittsburgh

  • Sangwoo Ryu

    • Dept. of Materials Science and Engineering, University of Wisconsin-Madison, Wisconsin 53706, USA
    • University of Wisconsin-Madison

  • Chang-Beom Eom

    • Dept. of Materials Science and Engineering, University of Wisconsin-Madison, Wisconsin 53706, USA
    • University of Wisconsin-Madison
    • Department of Materials Sciences and Engineering, University of Wisconsin-Madison

  • Jeremy Levy

    • University of Pittsburgh
    • Department of Physics and Astronomy, University of Pittsburgh