Micromolding fabrication of ``T'' cross section SiC SPM probes

Micromolding techniques using pre-ceramic polymers have been demonstrated for the creating silicon carbide based AFM cantilevers. In an attempt to reach higher resonance frequencies without significantly increasing the spring constant of the cantilevers, a ``T'' cross section cantilever was fabricated. The resonant frequency and spring constant have been compared to the standard rectangular cross section cantilevers of both Sic and commercially available silicon cantilevers.