Phase Diagram of Thin Film Oxides Growth by Pulsed Laser Deposition
ORAL
Abstract
We present a qualitative analysis of the microscopic thermo-dynamical origin of thin film oxides growth using the pulsed laser deposition technique. A phase diagram containing different growth mechanisms has been established. By tuning growth parameters experimentally in [LaSr]MnO3/SrTiO3 system, we observe an excellent fit of thin film morphologies to our growth phase diagram. Our results offer guidance on controlling morphology, stoichiometry and crystallinity of oxides thin films.
*Research sponsored by the Division of Materials Sciences and Engineering, Office of Basic Energy Sciences, U.S. Department of Energy
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