Suspension of Graphene and Bi2Se3 Atomic Membrane

Coupling high quality, suspended atomic membranes to specialized electrodes enables investigation of many novel phenomena, such as spin or Cooper pair transport in these two dimensional systems. However, many electrode materials are not stable in acids that are used to dissolve underlying substrates. Here we present a versatile and powerful multi-level lithographical technique to suspend atomic membranes, which can be applied to the vast majority of substrate, membrane and electrode materials. We also demonstrate, for the first time, fabrication and measurement of a free-standing thin Bi$_{2}$Se$_{3}$ membrane, which has low contact resistance to electrodes and a mobility of $\ga$500 cm$^{2}$/Vs.