Polymer nanopillar arrays via NIL for optical, photovoltaic and sensing applications

We have used nanoimprint lithography to fabricate high fidelity replicants of silicon nanopillar arrays in polymer form, using PDMS molds to create SU-8 and siloxane spin-on-glass structures. Typical nanopillar dimensions are 50-200 nm diameter and 1-2 $\mu $m height, with pitches between 0.8 and 1.5 $\mu $m. Both substrated and free-standing films have been produced. Forming the structural cores of nanocoaxial electrodes, the polymer nanopillars can facilitate a flexible platform for a wide variety of nanoscale applications, including optical waveguiding, solar cells, and multiplexed biochemical sensing. We will report on each.