Fabrication of High Quality Suspended Graphene devices

ORAL

Abstract

Suspended graphene devices have been demonstrated to have ultra-high mobility, enabling the recent obsevation of fractional quantum Hall effect. Here we report a lithography-free technique for fabrication of suspended graphene devices. Graphene sheets are exfoliated over pre- defined trenches on the substrate. Hard shadow masks are etched from Si wafers and aligned to the trenches. Metals are evaporated through the masks to form clean suspended devices, eliminating contaminants introduced by lithography and etching processes. The completed devices have high mobilities $\sim $100,000 cm$^2$/Vs.

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Authors

  • Zeng Zhao

    • Department of Physics and Astronomy, University of California at Riverside

  • Wenzhong Bao

    • UC Riverside
    • Department of Physics and Astronomy, University of California at Riverside
    • University of California, Riverside

  • Hang Zhang

    • Department of Physics and Astronomy, University of California at Riverside
    • University of California, Riverside

  • Lei Jing

    • Department of Physics and Astronomy, University of California at Riverside
    • University of California, Riverside

  • Velasco Jairo

    • Department of Physics and Astronomy, University of California at Riverside

  • Gang Liu

    • Department of Physics and Astronomy, University of California at Riverside
    • University of California, Riverside

  • Chun Ning Lau

    • UC Riverside
    • Department of Physics and Astronomy, University of California at Riverside
    • University of California, Riverside