Sideband Resolved Cooling of a Nanomechanical Resonator Parametrically Coupled to a Microwave Resonator

We have fabricated a nanostructure formed by a radio-frequency nanomechanical (NEMS) resonator capacitively coupled to an aluminum 5 GHz superconducting, co-planar waveguide (CPW) resonator with 50 $\Omega$ characteristic impedance.By driving this coupled system at a frequency $\omega_{pump} =\omega_{CPW} - \omega_{NEMS}$, we demonstrate back action cooling effects of a single NEMS mode achieving cooling from temperatures of 100mK to $<$10mK, with the lowest occupation factor of N$<$30. We have recently demonstrated a Nb, 130 $\Omega$ 5 GHz, Q=15,000 microwave resonator which we expect to be capable of cooling the NEMS close to ground state.