Temperature Dependence of Gigahertz-Range Ultra-High Frequency Micromechanical Resonators

We report measurements of bulk mode resonators in the ultrahigh frequency range up to 4 GHz. The devices are fabricated with a stack of materials and actuated using piezeoelectric technique. Typical dimensions of these resonators are 100 $\mu $m in length and width and 10 $\mu $m in thickness. The temperature dependence of mode frequencies and quality factor Q are investigated for temperatures ranging from 0.3 K - 400 K.