Transport properties of transparent conducting oxide thin film, Nb:In2O3

ORAL

Abstract

Thin films of Nb-doped In$_{2}$O$_{3}$ were deposited on YSZ(001) by magnetron co-sputtering. The well-oriented thin films were studied as a function of Nb doping by x-ray diffraction, optical absorption spectroscopy and magneto-transport measurement. The optical transparency in the visible and infrared spectral ranges is 97-99{\%} while the electrical resistivity is about 0.4 m$\Omega $-cm. The variation of these properties with respect to doping will be discussed in the context of scattering and optical transition mechanisms. *Also with Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China.

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Authors

  • O. Lozano*

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX
    • Department of Physics and Texas Center for Superconductivity, University of Houston,TX

  • Q.Y. Chen*

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX
    • Department of Physics and Texas Center for Superconductivity, University of Houston,TX

  • P.V. Chinta*

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX

  • P.V. Wadekar

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX
    • Department of Physics and Texas Center for Superconductivity, University of Houston,TX
    • Department. of Physics \& Texas Center for Superconductivity, University of Houston, Texas, 77204, USA

  • O. Lozano*

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX
    • Department of Physics and Texas Center for Superconductivity, University of Houston,TX

  • D. Wijesundera

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX

  • W.K. Chu

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX
    • Department of Physics and Texas Center for Superconductivity, University of Houston,TX

  • H.W. Seo

    • Department of Physics, University of Arkansas, Little Rock, AR
    • Dept of Physics, University of Arkansas, AR

  • L.W. Tu

    • Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China
    • Center for Nanoscience and Nanotechnology and Dept of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan

  • Yung-Hsi Chang

    • Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China
    • Center for Nanoscience and Nanotechnology and Dept of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan
    • Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, Republic of China

  • Wen-Yuan Pang

    • Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China
    • Center for Nanoscience and Nanotechnology and Dept of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan
    • Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, R.O.C.
    • Department of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.
    • Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, Republic of China

  • Ikai Lo

    • Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China
    • Center for Nanoscience and Nanotechnology and Dept of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan
    • Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, R.O.C.
    • Department of Physics, National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.
    • Department of physics, National Sun Yat-sen University, Kaohsiung, Taiwan, Republic of China

  • S.W. Yeh

    • Department of Materials and Optoelectronic Sciences and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan
    • Center for Nanoscience and Nanotechnology and Dept of Materials and Optoelectronic Engg, National Sun Yat-Sen University (NSYSU), Kaohsiung, Taiwan

  • N.J. Ho

    • Department of Materials and Optoelectronic Sciences and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan
    • Center for Nanoscience and Nanotechnology and Dept of Materials and Optoelectronic Engg, National Sun Yat-Sen University (NSYSU), Kaohsiung, Taiwan