Nano-electromechanical systems based on a piezoelectric single crystalline thin film on Silicon

ORAL

Abstract

Nano-electromechanical systems (NEMS) have shown great progress and promise as sensors and actuators. In spite of great progress, efficiency and integration techniques for actuating and tuning NEMS has remained a challenge. We have employed a single crystalline piezoelectric thin film on a silicon substrate to obtain a high piezoelectric coefficient and high electromechanical coupling for a NEMS device. The suspended NEMS device consists of Pt/Pb(Mg$_{x}$Nb$_{1-x})$-PbTiO$_{3}$/SrRuO$_{3}$/SiTiO$_{3}$ and is clamped at the ends via silicon substrate. Pt and SrRuO$_{3}$ are used as top and bottom electrodes, respectively, and SiTiO3 serves as a buffer layer to the silicon substrate. We have shown experimentally that the piezoelectric actuation based on PMN-PT devices consume less power and are more responsive than other NEMS devices of similar nature and size.

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Authors

  • Jonghoo Park

    • Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI 53706

  • Dustin J. Kreft

    • Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI 53706

  • Robert H. Blick

    • Electrical \& Computer Engineering, University of Wisconsin-Madison
    • Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI 53706

  • Seung-Hyub Baek

    • University of Wisconsin, Madison
    • University of Wisconsin-Madison
    • Department of Material Science and Engineering, University of Wisconsin-Madison, WI 53706

  • Chang Beom Eom

    • University of Wisconsin, Madison
    • University of Wisconsin-Madison
    • Department of Material Science and Engineering, University of Wisconsin-Madison, WI 53706
    • UW-Madison

  • V. Vaithyanathan

    • Department of Material Science and Engineering, Pennsylvania State University, PA 16802

  • Darrell G. Schlom

    • Department of Materials Science and Engineering, Cornell University, NY 14853

  • Vladimir Aksyuk

    • Alcatel-Lucent Technologies, NJ 07974