Hyper Piezoelectric Nano-Electromechanical Systems

ORAL

Abstract

Piezoelectric materials are extremely important for applications in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS). Here, we will be presenting PMN-PT (Lead Magnesium Niobate-Lead Titanate) on SOI as a hyper piezoelectric material for NEMS devices. The main advantages are the extremely high piezoelectric coefficient, higher electromechanical coupling, and larger attainable bandwidth. This will lead to enhanced agility of NEMS/MEMS devices and lower energy consumption. The work will also have considerable impact for nanoscale mechanics.

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Authors

  • Dustin Kreft

    • Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI 53706

  • Robert Blick

    • Electrical \& Computer Engineering, University of Wisconsin-Madison
    • Department of Electrical and Computer Engineering, University of Wisconsin-Madison, WI 53706

  • Seung-Hyub Baek

    • Department of Material Science and Engineering, University of Wisconsin-Madison, WI 53706

  • Chang-Beom Eom

    • Department of Material Science and Engineering, University of Wisconsin-Madison, WI 53706

  • V. Vaithyanathan

    • Department of Material Science and Engineering, Pennsylvania State University, PA 16802

  • Darrell Schlom

    • Department of Material Science and Engineering, Pennsylvania State University, PA 16802

  • Vladimir Aksyuk

    • Alcatel-Lucent Technologies, NJ 07974