Electromechanical Resonators from Atomically Thin Graphite

ORAL

Abstract

We fabricate nanoelectromechanical systems (NEMS) from atomically thin graphite by mechanically exfoliating thin sheets over trenches in SiO$_{2}$. Vibrations with fundamental resonant frequencies in the MHz range are actuated either optically or electrically and detected optically by interferometry. We make a detailed study of the mechanical properties of these resonators including resonance frequency, spring constant, built in tension, and quality factor. The thinnest resonator consists of a single suspended layer of atoms and represents the ultimate limit of a two dimensional NEMS.

–

Authors

  • Scott Bunch

    • Cornell Center for Materials Research
    • Cornell University

  • Arend van der Zande

    • Cornell Center for Materials Research
    • Cornell University

  • Scott Verbridge

    • Cornell Center for Materials Research
    • Cornell University

  • Ian Frank

    • Pomona College

  • David Tanenbaum

    • Pomona College

  • Jeevak Parpia

    • Cornell Center for Materials Research
    • Cornell University

  • Harold Craighead

    • Cornell Center for Materials Research
    • Applied and Engineering Physics, Cornell University
    • Cornell University
    • Cornell Univeristy

  • P. L. McEuen

    • Laboratory of Atomic and Solid State Physics, Cornell University
    • Cornell University
    • LASSP, Cornell University
    • Cornell Center for Materials Research
    • Laboratory of Atomic and Solid-State Physics, Cornell University
    • Center for Nanoscale Systems; Laboratory of Atomic and Solid State Physics, Cornell University, Ithaca, 14850
    • Physics Dept., Cornell University, Ithaca, NY 14853