X-ray scattering studies of surface and pore morphologies on nanoporous organosilicate films

POSTER

Abstract

We have studied surface and pore morphologies and structure of nanoporous organosilicate films. We have employed the grazing incidence small angle x-ray scattering (GISAXS) and x-ray reflectivity (XRR) for characterizing the pore size distribution, shape, porosity, and electron density, roughness, respectively. We have measured in situ the pore morphologies depending on the types of porogens, loading densities along the pore generation process. The results will be discussed with the mechanical properties for finding the optimized condition for low dielectric constant.

*supported by Korea Science \& Engineering Foundation and Seoul Research \& Business Development program (10816).

Authors

  • Jeeun Kim

    • Dept. of Physics \& Interdisciplinary Program of Integrated Biotechnology, Sogang University, Korea

  • Heeju Lee

    • Dept. of Physics \& Interdisciplinary Program of Integrated Biotechnology, Sogang University, Korea

  • Youngsuk Byun

    • Dept. of Physics \& Interdisciplinary Program of Integrated Biotechnology, Sogang University, Korea

  • Sanghoon Song

    • Dept. of Physics \& Interdisciplinary Program of Integrated Biotechnology, Sogang University, Korea

  • Hyunjung Kim

    • Dept. of Physics \& Interdisciplinary Program of Integrated Biotechnology, Sogang University, Korea

  • Sungkyu Min

    • Dept. of Chemical Biomolecular Engneering, Sogang University, Korea

  • Taehoon Lee

    • Dept. of Chemical Biomolecular Engneering, Sogang University, Korea

  • Gunwoo Park

    • Dept. of Chemical Biomolecular Engneering, Sogang University, Korea

  • Heewoo Rhee

    • Dept. of Chemical Biomolecular Engneering, Sogang University, Korea

  • Gwangwoo Kim

    • Pohang Accelerator Laboratory, Korea

  • Xuefa Li

    • Argonne National Laboratory, Argonne, IL 60439

  • Jin Wang

    • Argonne National Laboratory, Argonne, IL 60439