Table Top Extreme Ultraviolet Holography. Present and future capabilities

POSTER

Abstract

We report nanometer-scale spatial resolution obtained with Gabor holography using a highly coherent table-top capillary discharge laser. This compact table-top laser provides highly coherent illumination at $\lambda $= 46.9 nm. The hologram was recorded with high spatial resolution in a photoresist and subsequently digitized using an atomic force microscope to reveal the topography of the imprinted pattern. The final image was numerically reconstructed with a Fresnel propagator. Optimal reconstruction parameters and quantification of spatial resolution were obtained with a wavelet analysis and image correlation.

Authors

  • Przemyslaw Wachulak

    • Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA
    • Departament of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA

  • Mario Marconi

    • Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA
    • Departament of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA

  • Randy Bartels

    • Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA

  • Carmen Menoni

    • Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA
    • Departament of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA

  • Jorge Rocca

    • Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA
    • Departament of Electrical and Computer Engineering, Colorado State University, Fort Collins, CO 80523, USA