Gas cluster ion irradiation in formation of nano-ripple structures on silicon surfaces and its applications to producing III-nitride nanorods

ORAL

Abstract

Gas cluster ion beams (GCIB) have been used to fabricate nano-ripple structures on Si substrates. In this work, using (Ar)$_{n}^{+}$ clusters at 30 kV acceleration, where n$\approx $3,000, we have observed nano-ripple formations on the silicon surface after GCIB bombardment. The wavelength, amplitude and the dimensions of the ripples were studied in an effort to characterize the morphology as a function of angle of incidence, crystallographic orientations of the substrate, and the ion dosages. The underlying physics of ripple formation will be discussed and fabrication of nanorods on rippled (111)-Si substrates using III-nitrides, such as GaN, InGaN, and InAlN, will be presented.

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Authors

  • O. Lozano

    • Dep. of Physics and TcSUH, University of Houston, TX
    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.
    • Dept. of Physics and TcSUH,University of Houston, TX

  • X.M. Wang

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.

  • Q.Y. Chen

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.
    • Dept. of Physics and TcSUH,University of Houston, TX
    • Dept. of Phy. and Center for Nanoscience and Nanotechnology, Natl. Sun Yat-Sen U./Dept. of Phy. and Texas Center for Superconductivity, U. of Houston

  • J.R. Liu

    • Dep. of Physics and TcSUH, University of Houston, TX
    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.

  • P.V. Chinta

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.

  • P.V. Wadekar

    • Dep. of Physics and TcSUH, University of Houston, TX
    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.
    • Dept. of Physics and TcSUH,University of Houston, TX

  • W.K. Chu

    • Department of Physics and Texas Center for Superconductivity, University of Houston, Houston, TX.
    • Dept. of Physics and Texas Center for Superconductivity, Univ. of Houston

  • H.W. Seo

    • Dep. of Physics, University of Arkansas, AR
    • Department of Physics, University of Arkansas, Little Rock, AR
    • Dept.of Physics, University of Arkansas,AR
    • Dept. of Physics, Univ. of Arkansas

  • Li-Wei Tu

    • Department of Physics, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
    • Dep. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, NSYSU, Taiwan
    • Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China
    • Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University NSYSU, Kaohsiung, Taiwan
    • Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen Univ.

  • Li-Wei Tu

    • Department of Physics, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
    • Dep. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, NSYSU, Taiwan
    • Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China
    • Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University NSYSU, Kaohsiung, Taiwan
    • Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen Univ.

  • Li-Wei Tu

    • Department of Physics, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
    • Dep. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, NSYSU, Taiwan
    • Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, Taiwan, Republic of China
    • Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University NSYSU, Kaohsiung, Taiwan
    • Dept. of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen Univ.