Nano-scale resolution full-field microscopy using tabletop extreme ultraviolet lasers

ORAL

Abstract

We have developed two compact full-field extreme ultraviolet (EUV) microscopes that combine short-wavelength light from high-brightness tabletop lasers with zone plate and multilayer-coated reflective optics. One of these systems uses 47 nm wavelength light from a desktop-sized capillary discharge laser with resolution down to 70nm. This microscope can image in both transmission and reflection mode, allowing for imaging of surfaces. The other microscope uses 13 nm wavelength light from a table-top optically pumped EUV laser to acquire images with spatial resolution better than 38 nm. Both of these systems have the ability to render images with typical acquisition times of 10- 30 seconds These results open a path to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.

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Authors

  • Fernando Brizuela

    • Colorado State University

  • Courtney Brewer

    • Colorado State University

  • Georgiy Vaschenko

    • Colorado State University

  • Yong Wang

    • Colorado State University

  • Miguel A. Larotonda

    • Colorado State University

  • Bradley Luther

    • Colorado State University

  • Mario Marconi

    • NSF ERC for Extreme Ultraviolet Science and Technology, CSU
    • Colorado State University

  • Jorge J. Rocca

    • NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University Departments of Chemistry and Electrical and Computer Engineering
    • NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University
    • Colorado State University
    • NSF ERC for Extreme Ultraviolet Science and Technology, CSU

  • Carmen S. Menoni

    • Colorado State University

  • Weilun Chao

    • University of California, Berkeley

  • Yanwei Liu

    • University of California, Berkeley

  • Erik Anderson

    • University of California, Berkeley

  • David Attwood

    • University of California, Berkeley

  • Alexander Vinogradov

    • P. N. Lebedev Physical Institute, Moscow, Russia

  • Igor Artioukov

    • P. N. Lebedev Physical Institute, Moscow, Russia

  • Yuri Pershyn

    • NationalTechnical University ``KhPI'', Kharkov, Ukraine

  • Viktor Kondratenko

    • NationalTechnical University ``KhPI'', Kharkov, Ukraine