Lithography
INVITED · U4 ·
Presentations
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Step and Flash Imprint Lithography
COFFEE_KLATCH · Invited
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Authors
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Grant Willson
- The University of Texas
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Will optical lithography live forever?
COFFEE_KLATCH · Invited
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Authors
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Ralph Dammel
- AZ Electronic Materials
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Directed assembly of block copolymer containing materials on chemically nanopatterned substrates: a platform for two and three-dimensional nanofabrication
COFFEE_KLATCH · Invited
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Authors
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Paul Nealey
- University of Wisconsin
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Probing the 3-Dimensional Structure of Nanomanufactured Materials using CD-SAXS
COFFEE_KLATCH · Invited
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Authors
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Ronald L. Jones
- NIST Polymers Division
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Characterization of Materials for Nanoscale Lithography
COFFEE_KLATCH · Invited
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Authors
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William Hinsberg
- IBM Almaden Research Center, San Jose CA
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