Focus Session: Emerging Research Devices and Materials for Microelectronics Industry I

Presentations

• The scanned-probe microscope as nano-metrology tool

  ORAL

  March 14, 2006, 8:00 AM – March 14, 2006, 8:12 AM

  Authors

  • Ying Xu

  • K. Moloni

  • M.G. Lagally

    • University of Wisconsin-Madison, Madison WI 53706
    • nPoint, Inc., Madison WI 53714 www.npoint.com

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• Optical metrology of sub-wavelength critical dimensions of lines on Si wafers

  ORAL

  March 14, 2006, 8:12 AM – March 14, 2006, 8:24 AM

  Authors

  • B.M. Barnes

  • R. Attota

  • T.A. Germer

  • Jay Jun

  • E. Marx

  • H. Patrick

  • M.T. Stocker

  • R.M. Silver

    • NIST, Gaithersburg, MD

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• Measurement of Thicknesses of High-$\kappa $ Gate-Dielectric Films on Silicon by Angle-Resolved XPS

  ORAL

  March 14, 2006, 8:24 AM – March 14, 2006, 8:36 AM

  Authors

  • Cedric Powell

    • NIST
    • NIST, Gaithersburg

  • Werner Smekal

  • Wolfgang Werner

    • Technical University of Vienna

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• Terahertz Spectroscopy as a non contact estimation technique of defect states in high dielectric constant materials

  ORAL

  March 14, 2006, 8:36 AM – March 14, 2006, 8:48 AM

  Authors

  • Amartya Sengupta

  • Aparajita Bandyopadhyay

    • New Jersey Institute of Technology

  • Hakan Altan

    • City College of New York

  • John Federici

    • New Jersey Institute of Technology

  • Haim Grebel

    • New Jersey Institute of Technology

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• 3D-Imaging of Non-spherical Silicon Nanoparticles Embedded in Silicon Oxide by Plasmon Tomography

  ORAL

  March 14, 2006, 8:48 AM – March 14, 2006, 9:00 AM

  Authors

  • Aycan Yurtsever

    • School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14850

  • Matthew Weyland

  • David A. Muller

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• Metrology for new microelectronic materials.

  COFFEE_KLATCH · Invited

  March 14, 2006, 9:00 AM – March 14, 2006, 9:36 AM

  Authors

  • Eric Vogel

    • NIST

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• Internal dielectric interface: SiO$_{2}$- HfO$_{2}$

  ORAL

  March 14, 2006, 9:36 AM – March 14, 2006, 9:48 AM

  Authors

  • Onise Sharia

  • Alex Demkov

  • Genadi Bersuker

  • Byoung Hun Lee

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• Nanometer-resolution measurement and modeling of lateral variations of the effective work function at metal-bilayer /oxide interfaces

  ORAL

  March 14, 2006, 9:48 AM – March 14, 2006, 10:00 AM

  Authors

  • W. Cai

  • K. -B. Park

  • J. P. Pelz

    • Dept. of Physics, The Ohio State University

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• Is the oxygen vacancy the dominating charge trap in hafnia based MOSFETs?

  ORAL

  March 14, 2006, 10:00 AM – March 14, 2006, 10:12 AM

  Authors

  • Jacob Gavartin

  • David Munoz-Ramo

  • Alexander Shluger

  • Marshall Stoneham

    • Centre for Materials Research, Department of Physics and Astronomy, University College London, UK
    • University College London, U.K.
    • University College London

  • Gennadi Bersuker

    • SEMATECH, TX, U.S.A.
    • SEMATECH

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• Resistive Switching of Individual Dislocations in Insulating Perovskites -- A Potential Route Towards Nanoscale Non-Volatile Memories.

  ORAL

  March 14, 2006, 10:12 AM – March 14, 2006, 10:24 AM

  Authors

  • Krzystof Szot

  • Wolfgang Speier

  • Gustav Bihlmayer

  • Rainer Waser

    • CNI \& IFF, FZ Juelich
    • Center of Nanoelectronic Systems for Information Technology, Research Center Juelich, Germany

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• Electrical characteristic of metal-oxide-semiconductor with NiSi$_{2}$ nanocrystals embedded in oxide layer

  ORAL

  March 14, 2006, 10:24 AM – March 14, 2006, 10:36 AM

  Authors

  • Jenn-Kai Tsai

  • Ikai Lo

  • M.H. Gau

  • Y.L. Chen

  • P.H. Yeh

  • T.C. Chang

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• Photoemission Studies of Nitrided Hafnium Silicates for High-$\kappa$ Dielectrics

  ORAL

  March 14, 2006, 10:36 AM – March 14, 2006, 10:48 AM

  Authors

  • Anoop Mathew

  • Korhan Demirkan

    • University of Delaware

  • Chang-Gong Wang

  • Glen Wilk

    • ASM America Inc.

  • Robert Opila

    • University of Delaware

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