\textit{In situ} Optical Monitoring and Modeling of Vertically-Aligned Carbon Nanotube Array Growth During Chemical Vapor Deposition

ORAL

Abstract

A detailed experimental study of vertically aligned carbon nanotube array (VANTAs) growth by chemical vapor deposition (CVD) based on time-resolved reflectivity and direct remote microscope imaging as a diagnostic to measure and control the length of VANTAs \textit{in situ} was performed. The VANTA growth was investigated between 500 \r{ }C and 900 \r{ }C on Si substrates with different evaporated multilayer catalysts and different feedstock gases. Nanotube lengths were controlled by rapid evacuation of the chamber. A kinetic model was developed to explain the observed growth kinetics, to discuss the main processes responsible for the growth of VANTAs, and to predict optimal growth conditions for single-wall carbon nanotube (SWNT) arrays. High quality VANTAs containing SWNTs were synthesized and characterized using Raman Spectroscopy.

*This research was sponsored by the U.S. Department of Energy under contract DE-AC05-00OR22725 with the Oak Ridge National Laboratory, managed by UT-Battelle.

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Authors

  • A. A. Puretzky

    • Dept. of Mat. Sci. and Engr., Univ. of Tennessee
    • Department of Materials Science and Engineering, University of Tennessee, Knoxville

  • D. B. Geohegan

    • Oak Ridge National Laboratory
    • Oak Ridge National Lab, Oak Ridge, Tennessee 37831-6031

  • H. Cui

  • Gyula Eres

    • Oak Ridge National Laboratory

  • I. N. Ivanov

    • Condensed Matter Sciences Division, Oak Ridge National Laboratory, and Dep. of Mat. Sci. and Eng., Univ. of Tennessee