Focus Session: Supercritical Carbon Dioxide Processing

Presentations

• Supercritical Fluid Technology for Interconnect Fabrication

  COFFEE_KLATCH · Invited

  March 25, 2005, 8:15 AM – March 25, 2005, 8:51 AM

  Authors

  • James Watkins

    • University of Massachusetts
    • University of Massachusetts - Amherst

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• Development of Supercritical Processing in BEOL Cleans

  COFFEE_KLATCH · Invited

  March 25, 2005, 8:51 AM – March 25, 2005, 9:27 AM

  Authors

  • Richard Reidy

    • University of North Texas

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• Supercritical Fluid Research Capabilities and Collaborations at Los Alamos National Laboratory

  ORAL

  March 25, 2005, 9:27 AM – March 25, 2005, 9:39 AM

  Authors

  • Kirk Hollis

    • Los Alamos National Laboratory

  • Jerry Barton

    • Los Alamos National Laboratory

  • Craig Taylor

    • Los Alamos National Laboratory

  • Laurie Williams

    • Fort Lewis College

  • Melvin Carter

    • DuPont EKC Technology

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• SCORR - Supercritical Carbon Dioxide Resist Removal

  ORAL

  March 25, 2005, 9:39 AM – March 25, 2005, 9:51 AM

  Authors

  • Craig Taylor

    • Los Alamos National Laboratory

  • Jerry Barton

    • Los Alamos National Laboratory

  • Kirk Hollis

    • Los Alamos National Laboratory

  • Jim Rubin

    • Los Alamos National Laboratory

  • Laurie Williams

    • Fort Lewis College

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• Supercritical CO2 for Resist Development: Towards an All-Dry Lithography Process

  POSTER

  March 25, 2005, 9:51 AM – March 25, 2005, 10:03 AM

  Authors

  • Nelson Felix

    • School of Chemical and Biomolecular Engineering, Cornell University

  • Yu (Jessie) Mao

    • Department of Chemical Engineering, Massachusetts Institute of Technology

  • Karen Gleason

    • Department of Chemical Engineering, Massachusetts Institute of Technology

  • Christopher Ober

    • Department of Materials Science and Engineering, Cornell University

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• Effect of Ionic Conductivity of Elevated Pressure TMAHCO3 /MeOH/CO2 Mixtures on Cleaning Efficiency

  ORAL

  March 25, 2005, 10:03 AM – March 25, 2005, 10:15 AM

  Authors

  • Galit Levitin

  • Dennis W. Hess

    • Chemical Eng., Georgia Tech

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• Atomic Layer Deposition of High-k Dielectrics Using Supercritical CO$_2$

  ORAL

  March 25, 2005, 10:15 AM – March 25, 2005, 10:27 AM

  Authors

  • Rajesh Shende

  • Jorge Lubguban

  • Maslina Othman

  • Shubhra Gangopadhyay

    • Department of Electrical and Computer Engineering, University of Missouri - Columbia, Missouri 65211

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• Supercritical CO2/Co-solvents Extraction of Porogen and Surfactant to Obtain

  ORAL

  March 25, 2005, 10:27 AM – March 25, 2005, 10:39 AM

  Authors

  • Jorge Lubguban

  • Arnold Lubguban

  • Maslina Othman

  • Rajesh Shende

  • Shubhra Gangopadhyay

    • Dept. of Electrical Engineering, Univ. of Missouri-Columbia

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