Plasma Deposition

Presentations

• Investigation of stagnation point flow in an inductively coupled plasma for improved deposition processes

  ORAL

  Oct. 16, 2025, 4:00 PM – Oct. 16, 2025, 4:15 PM

  Publication: [1] H. Kim and I.-K. Oh, Jpn. J. Appl. Phys. 53, 03DA01 (2014).
  [2] S.(조상현) Jo and H.J.(김호준) Kim, Physics of Fluids 37, 013634 (2025).

  Presenters

  • Chan Yeong Jeong

    • Hanyang university

  Authors

  • Chan Yeong Jeong

    • Hanyang university

  • Sanghyun Jo

    • Hanyang university

  • Ho Jun Kim

    • Hanyang university

  View abstract →

• Study of Gas Phase Chemistry in Chemical Vapor Deposition Microwave Plasma Reactors for Diamond Growth

  ORAL

  Oct. 16, 2025, 4:15 PM – Oct. 16, 2025, 4:30 PM

  Presenters

  • Igor D Kaganovich

    • Princeton Plasma Physics Laboratory (PPPL)

  Authors

  • Mikhail Mokrov

    • Princeton Plasma Physics Laboratory

  • Igor D Kaganovich

    • Princeton Plasma Physics Laboratory (PPPL)

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• Hybrid simulation of RF CCPs and their interaction with surface

  ORAL · Invited

  Oct. 16, 2025, 4:30 PM – Oct. 16, 2025, 5:00 PM

  Presenters

  • Yuanhong Song

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian, China
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  Authors

  • Yuanhong Song

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian, China
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

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• Evaluation of deposition charactristics of hydrogenated amorphous carbon films using cumene plasma chemical vapor deposition

  ORAL

  Oct. 16, 2025, 5:00 PM – Oct. 16, 2025, 5:15 PM

  Publication: S. Ono et al., Deamond and Related Materials, 157 (2025), 112468.

  Presenters

  • Kazunori Koga

    • Kyushu University

  Authors

  • Kazunori Koga

    • Kyushu University

  • Shinjiro Ono

    • Kyushu University

  • Takamasa Okumura

    • Kyushu University

  • Kunihiro Kamataki

    • Kyushu University

  • Pankaj Attri

    • Kyushu University

  • Masaharu Shiratani

    • Kyushu University

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• Influence of hydrogen addition on carbon growth & morphology in microwave plasma driven pyrolysis of methane

  ORAL

  Oct. 16, 2025, 5:15 PM – Oct. 16, 2025, 5:30 PM

  Presenters

  • Xiaoyu Wang

    • Maastricht University

  Authors

  • Xiaoyu Wang

    • Maastricht University

  • Martijn Ruijzendaal

    • Maastricht University

  • M.L. Azevedo

    • Maastricht University

  • Gerard van Rooij

    • Maastricht University

  • Dirk van den Bekerom

    • TNO

  View abstract →