Magnetic field induced mode transition in capacitive CF<sub>4</sub> plasmas

ORAL

Abstract

External magnetic fields offer greater flexibility in controlling process-relevant parameters in capacitively coupled plasmas, while also introducing additional complexity to the discharge. The effects of a transversal magnetic field on the electron power absorption dynamics in capacitive CF4 plasmas are studied based on Particle-in-cell/Monte Carlo Collision simulations. A magnetic field induced electropositive core, characterized by a pronounced electron density peak within the otherwise strongly electronegative plasma bulk region, is identified and the corresponding mode of discharge operation is referred to as the magnetized drift-ambipolar mode [1]. The magnetic field is also found to elevate ion densities beyond the threshold required for the formation of striations, thereby inducing a drift-ambipolar to striation mode transition, while under high pressures the striation mode is disrupted by the magnetic field due to the development of an electropositive core. These mode transitions, accompanied by significant changes in electron heating, electron energy distribution function and generation rates of neutral radicals are expected to exert a substantial influence on plasma processing performance.

*This work was supported by the German Research Foundation (No. 428942393) and by the National Natural Science Foundation of China (No. 12020101005, 12475202).1

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Publication: [1] Li Wang et al 2022 Plasma Sources Sci. Technol. 31 06LT01

Presenters

  • Li Wang

    • Ruhr University Bochum
    • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

Authors

  • Li Wang

    • Ruhr University Bochum
    • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

  • Aranka Derzsi

    • Wigner Research Center for Physics
    • HUN-REN Wigner Research Centre for Physics, Budapest, Hungary

  • Peter Hartmann

    • Wigner Research Centre for Physics, Hungary
    • HUN-REN Wigner Research Centre for Physics, Budapest, Hungary

  • Zoltan Donko

    • Wigner Research Center for Physics
    • HUN-REN Wigner Research Centre for Physics, Budapest, Hungary
    • Institute for Solid State Physics and Optics, HUN-REN Wigner Research Centre for Physics

  • Wan Dong

    • Dalian University of Technology

  • Maximilian Ryppa

    • Ruhr-University Bochum

  • Constantin Neuroth

    • Ruhr-University Bochum
    • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

  • Florian Beckfeld

    • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany
    • Ruhr University Bochum

  • Yuanhong Song

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian, China
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  • Julian Schulze

    • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany