Plasma-Surface Interactions II

Presentations

• Multi-scale Simulations of Ion Energy Effects on Amorphous Silicon (a-Si:H) Film Deposition

  ORAL

  Oct. 16, 2025, 11:00 AM – Oct. 16, 2025, 11:15 AM

  Presenters

  • Liuqin Song

    • Dalian University of Technology

  Authors

  • Liuqin Song

    • Dalian University of Technology

  • Wenzhu Jia

    • Southwest University

  • Wan Dong

    • Dalian University of Technology
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  • Yi-Fan Zhang

    • Dalian University of Technology

  • Yuanhong Song

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian, China
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

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• Plasma-electrochemical cell interaction: a novel approach to study plasma-surface chemical interactions

  ORAL

  Oct. 16, 2025, 11:15 AM – Oct. 16, 2025, 11:30 AM

  Presenters

  • Richard van de Sanden

    • DIFFER, Eindhoven, The Netherlands
    • Dutch Institute for Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands

  Authors

  • Richard van de Sanden

    • DIFFER, Eindhoven, The Netherlands
    • Dutch Institute for Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands

  • Xingyu Chen

    • Dutch Institute of Fundemental Energy Research, Eindhoven, The Netherlands and School of Electrical Engineering, Xi'an Jiaotong University, Xi'an, China

  • Aleksandr Pikalev

    • Dutch Institute for Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands

  • Vasco Guerra

    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Lisbon University
    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa
    • Instituto Superior Tecnico

  • Michail Tsampas

    • Dutch Institute for Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands

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• Exploring the Impact of Mask Geometries on High Aspect Ratio Silicon Etching Using Cl₂/O₂ Plasmas

  ORAL · Invited

  Oct. 16, 2025, 11:30 AM – Oct. 16, 2025, 12:00 PM

  Presenters

  • Xingyi Shi

    • Applied Materials

  Authors

  • Xingyi Shi

    • Applied Materials

  • Han Luo

    • Applied Materials, Inc.

  • Shahid Rauf

    • Applied Materials, Inc.

  • Jason Kenney

    • Applied Materials

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• Estimating the O recombination probability in Pyrex from the loss frequency in oxygen-containing plasma

  ORAL

  Oct. 16, 2025, 12:00 PM – Oct. 16, 2025, 12:15 PM

  Publication: Submitted to PSST: Assessing the meaning of the atomic oxygen loss frequency and recombination probability in oxygen glow discharges in Pyrex
  Planned: Estimating the O recombination probability in Pyrex from the loss frequency in CO2 plasma

  Presenters

  • Pedro Viegas

    • Instituto Superior Técnico - Universidade de Lisboa
    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico - Universidade de Lisboa

  Authors

  • Pedro Viegas

    • Instituto Superior Técnico - Universidade de Lisboa
    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico - Universidade de Lisboa

  • Tiago C Dias

    • University of Michigan

  • Vasco Guerra

    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Lisbon University
    • Instituto de Plasmas e Fusão Nuclear, Instituto Superior Técnico, Universidade de Lisboa
    • Instituto Superior Tecnico

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• Plasma Polymerization into 3D Structures

  ORAL

  Oct. 16, 2025, 12:15 PM – Oct. 16, 2025, 12:30 PM

  Presenters

  • Lenka Zajickova

    • CEITEC, Brno University of Technology

  Authors

  • Lenka Zajickova

    • CEITEC, Brno University of Technology

  • David Necas

    • CEITEC, Brno University of Technology

  • Martina Janusova

    • CEITEC, Brno University of Technology

  • Lucie Janu

    • CEITEC, Brno University of Technology

  • Paula Navascués

    • Empa, Swiss Federal Laboratories for Materials Science and Tecnology

  • Dirk Hegemann

    • Empa, Swiss Federal Laboratory for Materials Science and Technology

  • Nicole Rusnakova

    • Faculty of Science, Masaryk University, Brno

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