Capacitively Coupled Plasmas II

Presentations

• Different methods for improving uniformity of very high frequency capacitively coupled discharges

  ORAL

  Oct. 16, 2025, 9:00 AM – Oct. 16, 2025, 9:15 AM

  Presenters

  • Denis Eremin

    • Ruhr University Bochum

  Authors

  • Denis Eremin

    • Ruhr University Bochum

  • Yulia Sharova

    • Ruhr University Bochum

  • Liang Xu

    • Soochow University

  • Masaaki Matsukuma

    • Tokyo Electron Technology Solutions Limited

  • Thomas Mussenbrock

    • Ruhr-Universität Bochum

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

  View abstract →

• Electron dynamics and particle transport in capacitively coupled Ar/O₂ discharges driven by sawtooth up voltage waveform

  ORAL

  Oct. 16, 2025, 9:15 AM – Oct. 16, 2025, 9:30 AM

  Publication: Wan Dong et al 2025 Plasma Sources Sci. Technol. 34 025008

  Presenters

  • Wan Dong

    • Dalian University of Technology
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  Authors

  • Wan Dong

    • Dalian University of Technology
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  • Zhuo-Yao Gao

    • Dalian University of Technology

  • Li Wang

    • Ruhr University Bochum
    • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

  • Zhuo-Yao Gao

    • Dalian University of Technology

  • Zhuo-Yao Gao

    • Dalian University of Technology

  • Yong-Xin Liu

    • Dalian University of Technology

  • Yuanhong Song

    • Dalian University of Technology
    • School of Physics, Dalian University of Technology, Dalian, China
    • Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian

  • Julian Schulze

    • Ruhr University Bochum

  View abstract →

• ­­­­­Simulation benchmarks of the PIC-MCC codes XPDP1 and VSim for helium capacitively coupled plasma discharges with spatiotemporal analysis

  ORAL

  Oct. 16, 2025, 9:30 AM – Oct. 16, 2025, 9:45 AM

  Presenters

  • Kaviya Aranganadin

    • Hanyang University

  Authors

  • Kaviya Aranganadin

    • Hanyang University

  • Guo-Ning Wang

    • Hanyang University

  • Hua-Yi Hsu

    • National Taipei University of Technology

  • John P. Verboncoeur

    • Michigan State University

  • Ming-Chieh Lin

    • Hanyang University

  View abstract →

• On electron power absorption in low pressure electronegative capacitive discharges

  ORAL

  Oct. 16, 2025, 9:45 AM – Oct. 16, 2025, 10:00 AM

  Presenters

  • Jon Tomas Gudmundsson

    • University of Iceland

  Authors

  • Jon Tomas Gudmundsson

    • University of Iceland

  View abstract →

• Scaling of Capacitively Coupled Plasmas Properties up to 10s of kV Driving Voltages

  ORAL

  Oct. 16, 2025, 10:00 AM – Oct. 16, 2025, 10:15 AM

  Presenters

  • Andrew Tasman Powis

    • Princeton Plasma Physics Laboratory, Princeton, USA

  Authors

  • Andrew Tasman Powis

    • Princeton Plasma Physics Laboratory, Princeton, USA

  • Sarveshwar Sharma

    • Institute for Plasma Research

  • Alexander V. Khrabrov

    • Princeton Plasma Physics Laboratory (PPPL)

  • Igor D Kaganovich

    • Princeton Plasma Physics Laboratory (PPPL)

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• Ion energy distribution transitions from multimodal to quasi-single-peak in capacitive discharges driven by tailored voltage waveforms

  ORAL

  Oct. 16, 2025, 10:15 AM – Oct. 16, 2025, 10:30 AM

  Presenters

  • Deqi Wen

    • Dalian University of Technology

  Authors

  • Chan Feng

    • Dalian University of Technology

  • Deqi Wen

    • Dalian University of Technology

  • Jon Tomas Gudmundsson

    • University of Iceland

  • John P. Verboncoeur

    • Michigan State University

  • Julian Schulze

    • Chair of Applied Electrodynamics and Plasma Technology, Ruhr University Bochum, Bochum, Germany

  • You-Nian Wang

    • Dalian university of technology
    • Dalian University of Technology

  View abstract →