Spatially Resolved Parameter-Measurement of Oxygen ICP via Optical Emission Spectroscopy with Tomographic Analysis

Optical Emission Spectroscopy (OES) combined with tomographic analysis was used to measure spatial distributions of plasma radiance in oxygen inductively coupled plasma (ICP). From the reconstructed radiance profiles, the dissociation degree of oxygen molecules was estimated using actinometry. These results were then applied to a Collisional-Radiative Model (CRM) to calculate spatial distributions of electron temperature and electron density. The combined use of tomographic OES, actinometric analysis, and CRM enabled a detailed, spatially resolved characterization of oxygen plasma parameters under ICP power conditions of 400–800 W and pressure conditions of 1–10 Pa.