Plasma Semiconductor Applications

Presentations

• The effect of cryogenic substrate cooling on electron energy distribution in inductively coupled plasma

  ORAL

  Oct. 14, 2025, 9:00 AM – Oct. 14, 2025, 9:15 AM

  Presenters

  • JONGHA AHN

    • Department of Electrical Engineering, Hanyang University

  Authors

  • JONGHA AHN

    • Department of Electrical Engineering, Hanyang University

  • DEOKHWAN KIM

    • Hanyang university
    • Department of electrical engineering, Hanyang University, Seoul, Korea
    • Department of Electrical Engineering, Hanyang University

  • Chin-Wook Chung

    • Department of electrical engineering, Hanyang University, Seoul, Korea1
    • Hanyang University

  View abstract →

• Development of a Transformer-Coupled Plasma Source with Enhanced Radical Delivery and Plasma Ignition for Next-Generation Plasma Processing

  ORAL

  Oct. 14, 2025, 9:15 AM – Oct. 14, 2025, 9:30 AM

  Presenters

  • Jaehoon Choi

    • Wonik IPS

  Authors

  • Jaehoon Choi

    • Wonik IPS

  • Tae S Cho

    • Wonik IPS

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• Development of a High-Pressure Compatible Self Plasma-Optical Emission Spectrometer for Real-Time Plasma Process Monitoring

  ORAL

  Oct. 14, 2025, 9:30 AM – Oct. 14, 2025, 9:45 AM

  Presenters

  • Geon Woong Eom

    • Korea Institute of Machinery and Materials

  Authors

  • Geon Woong Eom

    • Korea Institute of Machinery and Materials

  • SangHo Lee

    • Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials
    • Korea Institute of Machinery and Materials

  • InYong Park

    • Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials
    • Korea Institute of Machinery and Materials

  • Woo Seok Kang

    • Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials
    • Korea Institute of Machinery and Materials

  • Min Hur

    • Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials
    • Korea Institute of Machinery and Materials

  • Dae-Woong Kim

    • Semiconfuctor Equipment Research Center, Korea Institute of Machinery and Materials
    • Korea Institute of Machinery and Materials

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• Tunable antenna array for large area microwave plasma source for semiconductor manufacturing

  ORAL

  Oct. 14, 2025, 9:45 AM – Oct. 14, 2025, 10:00 AM

  Presenters

  • Giwon Shin

    • Wonik IPS

  Authors

  • Giwon Shin

    • Wonik IPS

  • Jaehoon Choi

    • Wonik IPS

  • Sooyoung Hwang

    • Wonik IPS

  • Jeonghun Kim

    • Wonik IPS

  • Hakmin Kim

    • Wonik IPS

  • Minhee Lee

    • Wonik IPS

  • Tae S Cho

    • Wonik IPS

  • Hyunho Yun

    • Wonik IPS

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• Beamline pressure effect on ion beam transport in ion implanters

  ORAL · Invited

  Oct. 14, 2025, 10:00 AM – Oct. 14, 2025, 10:30 AM

  Presenters

  • John (Bon-Woong) Koo

    • Applied Materials

  Authors

  • John (Bon-Woong) Koo

    • Applied Materials

  • Frank Sinclair

    • Applied Materials

  • Paul Murphy

    • Applied Materials

  View abstract →