Discharge Plasma I

Presentations

• Radio-frequency plasma ignition study in a plasma enhanced chemical vapor deposition chamber

  ORAL

  Oct. 1, 2024, 10:00 AM – Oct. 1, 2024, 10:15 AM

  Presenters

  • Edward P Hammond

    • Applied Materials, Inc.

  Authors

  • Edward P Hammond

    • Applied Materials, Inc.

  • Yuhua Xiao

    • Applied Materials

  • Rajeshkumar Putti

    • Applied Materials

  View abstract →

• The quasineutrality assumption in the ionization region of a magnetron in the presence of electron number perturbations

  ORAL

  Oct. 1, 2024, 10:15 AM – Oct. 1, 2024, 10:30 AM

  Presenters

  • Kevin Koehn

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  Authors

  • Kevin Koehn

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  • Lukas L Vogelhuber

    • Bochum University
    • Ruhr University Bochum

  • Dennis Krueger

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  • Denis Eremin

    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum
    • Ruhr University Bochum

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• Hybrid Plasma Modeling of Capacitively-Coupled O2 Plasma at Intermediate Pressures and Comparison with Experiments

  ORAL

  Oct. 1, 2024, 10:30 AM – Oct. 1, 2024, 10:45 AM

  Presenters

  • Nakul Nuwal

    • Applied Materials

  Authors

  • Nakul Nuwal

    • Applied Materials

  • Rupali Sahu

    • Applied Materials

  • Kallol Bera

    • Applied Materials
    • Applied Materials, Inc.

  • Abhishek Verma

    • Applied Materials

  • Shahid Rauf

    • Applied Materials
    • Applied Materials, Inc.

  • Shu Zhang

    • LPP-CNRS

  • Garrett Curley

    • LPP-CNRS, Ecole Polytechnque, Palaiseau, France

  • Jean-Paul Booth

    • LPP-CNRS
    • The French National Centre for Scientific Research (CNRS)

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• Simulation and Characterization of Capacitively-Coupled Argon Plasma at Intermediate Pressure

  ORAL

  Oct. 1, 2024, 10:45 AM – Oct. 1, 2024, 11:00 AM

  Presenters

  • Rupali Sahu

    • Applied Materials

  Authors

  • Rupali Sahu

    • Applied Materials

  • Nakul Nuwal

    • Applied Materials

  • Kallol Bera

    • Applied Materials
    • Applied Materials, Inc.

  • Shahid Rauf

    • Applied Materials
    • Applied Materials, Inc.

  • Jean-Paul Booth

    • LPP-CNRS
    • The French National Centre for Scientific Research (CNRS)

  • Shu Zhang

    • LPP-CNRS

  • Garrett Curley

    • LPP-CNRS, Ecole Polytechnque, Palaiseau, France

  View abstract →

• The Inductively Coupled Array Discharge (INCA)

  ORAL · Invited

  Oct. 1, 2024, 11:00 AM – Oct. 1, 2024, 11:30 AM

  Publication: [1] Ph. Ahr, T.V. Tsankov, J. Kuhfeld, U. Czarnetzki, Philipp Ahr et al 2018 Plasma Sources Sci. Technol. 27 105010.
  [2] U. Czarnetzki and Kh. Tarnev, Physics of Plasmas 21, 123508 (2014).
  [3] Uwe Czarnetzki 2018 Plasma Sources Sci. Technol. 27 105011
  [4] Christian Lütke Stetzkamp et al 2021 J. Phys. D: Appl. Phys. 54 385204
  [5] Philipp Ahr, Dissertation RUB 2018
  [6] Christian Lütke Stetzkamp Dissertation RUB 2024
  

  Presenters

  • Uwe Czarnetzki

    • Ruhr-University Bochum, Faculty of Physics and Astronomy
    • Ruhr University Bochum

  Authors

  • Uwe Czarnetzki

    • Ruhr-University Bochum, Faculty of Physics and Astronomy
    • Ruhr University Bochum

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• Revealing spatiotemporal dynamics of electrons in planar magnetron plasmas

  ORAL

  Oct. 1, 2024, 11:30 AM – Oct. 1, 2024, 11:45 AM

  Presenters

  • Sedina Tsikata

    • Georgia Institute of Technology

  Authors

  • Sedina Tsikata

    • Georgia Institute of Technology

  • Thibault Dubois

    • ThrustMe

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• Electron Dynamics in Partially Magnetized Plasmas

  ORAL

  Oct. 1, 2024, 11:45 AM – Oct. 1, 2024, 12:00 PM

  Presenters

  • Lukas L Vogelhuber

    • Bochum University
    • Ruhr University Bochum

  Authors

  • Lukas L Vogelhuber

    • Bochum University
    • Ruhr University Bochum

  • Kevin Koehn

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  • Denis Eremin

    • Ruhr University Bochum

  • Dennis Krueger

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  View abstract →