Effects of DC magnetic field on an inductively coupled plasma with a DC biased grid

POSTER

Abstract

The effects of a DC magnetic field on the plasma with a very low electron temperature (~ 0.5 eV) below a DC biased grid are investigated. When the grid is negatively biased, the electron temperature is decreased below 1eV. The magnetic field enhances this decrease in the electron temperature. On the other hand, at electron cyclotron resonance (ECR) conditions, the electron temperature is not controlled by the grid. As the pressure increases, the control of electron temperature by the grid becomes possible even at ECR conditions. These shows that the effects of the magnetic field near ECR conditions are associated with the ECR, which is a highly effective heating mechanism for low energy electrons. These can be explained by electron kinetics and ambipolar diffusion of the plasma above and below the grid.

*This work was supported by the Technology Innovation Program (or Industrial Strategic Technology Development Program-Public-private joint investment semiconductor R&D program(K-CHIPS) to foster high-quality human resources) (RS-2023-00236642, Development of etching process and diagnostic technology using precursor with low GWP for next generation semiconductor process) funded By the Ministry of Trade, Industry & Energy(MOTIE, Korea)(1415187459)This work was supported by the Technology Innovation Program (20018982, High productivity hard mask PR stripper with high density plasma source) funded By the Ministry of Trade, Industry & Energy(MOTIE, Korea)This work was supported by the MOTIE(Ministry of Trade, Industry & Energy) (1415187722) and KSRC(Korea Semiconductor Research Consortium) (RS-2023-00235950) support program for the development of the future semiconductor device.

Presenters

  • Jeonghyun Lee

    • Hanyang University

Authors

  • Jeonghyun Lee

    • Hanyang University

  • Kim Min-Seok

    • Hanyang University
    • Hanyang university
    • Dept. of Electrical Engineering, Hanyang University

  • Jung Eun Choi

    • Hanyang University

  • Chinwook Chung

    • Hanyang University
    • Hanyang Univ
    • Dept. of Electrical Engineering, Hanyang University