Plasma Processing

Presentations

• Pressure dependence of DC magnetron discharges with 2D PIC simulation

  ORAL

  Oct. 2, 2024, 8:00 AM – Oct. 2, 2024, 8:15 AM

  Presenters

  • Joseph G Theis

    • University of Colorado Boulder

  Authors

  • Joseph G Theis

    • University of Colorado Boulder

  • Gregory R Werner

    • University of Colorado, Boulder

  • Thomas G Jenkins

    • Tech-X Corporation

  • Daniel S Main

    • Tech-X Corporation

  • John Robert Cary

    • University of Colorado, Boulder, Tech-X Corporation

  View abstract →

• Oxidation of the metal film prepared with magnetron sputtering by using the ICP source

  ORAL

  Oct. 2, 2024, 8:15 AM – Oct. 2, 2024, 8:30 AM

  Presenters

  • Kazunobu Maeshige

    • AGC inc.

  Authors

  • Kazunobu Maeshige

    • AGC inc.

  View abstract →

• Temporally modulated Ar/N₂/H₂ plasmas for atomic precision processing

  ORAL

  Oct. 2, 2024, 8:30 AM – Oct. 2, 2024, 8:45 AM

  Presenters

  • David R Boris

    • U.S. Naval Research Laboratory

  Authors

  • David R Boris

    • U.S. Naval Research Laboratory

  • Michael J Johnson

    • Plasma Physics Division, US Naval Research Laboratory
    • U.S. Naval Research Laboratory

  • Mackenzie E Meyer

    • National Research Council Postdoctoral Research Associate, Plasma Physics Division, US Naval Research Laboratory
    • US Naval Research Laboratory

  • Virginia D Wheeler

    • U.S. Naval Research Laboratory

  • Jeffrey M Woodward

    • U.S. Naval Research Laboratory

  • Scott G Walton

    • Plasma Physics Division, US Naval Research Laboratory

  View abstract →

• High-Powered Electron Beam Properties in PVD using the Kinetic Simulation Tool PICLas and Experimental Validation

  ORAL

  Oct. 2, 2024, 8:45 AM – Oct. 2, 2024, 9:00 AM

  Presenters

  • Paul Nizenkov

    • boltzplatz - numerical plasma dynamics GmbH

  Authors

  • Paul Nizenkov

    • boltzplatz - numerical plasma dynamics GmbH

  • Stephen Copplestone

    • boltzplatz - numerical plasma dynamics GmbH

  • Asim Mirza

    • boltzplatz - numerical plasma dynamics GmbH

  • Marcel Pfeiffer

    • Institute of Space Systems, University of Stuttgart

  • Andreas Jendrzey

    • Applied Materials Web Coating GmbH

  • Neil Morrison

    • Applied Materials Web Coating GmbH

  View abstract →

• Plasma density oscillations in an ion implanter source and their effect on ion beam transmission

  ORAL · Invited

  Oct. 2, 2024, 9:00 AM – Oct. 2, 2024, 9:30 AM

  Presenters

  • Alex Perel

    • Applied Materials, Inc.

  Authors

  • Alex Perel

    • Applied Materials, Inc.

  • Graham Wright

    • Applied Materials Inc

  • Adam McLaughlin

    • Applied Materials, Inc.

  • Alexandre Likhanskii

    • Applied Materials

  • Craig Chaney

    • Applied Materials, Inc.

  • Jay Scheuer

    • Applied Materials, Inc.

  • Suren Madunts

    • Applied Materials, Inc.

  View abstract →