Plasma Etching I

Presentations

• Physical and chemical effects in low temperature etching of memory devices

  ORAL · Invited

  Oct. 1, 2024, 10:00 AM – Oct. 1, 2024, 10:30 AM

  Presenters

  • Thorsten Lill

    • Lam Research

  Authors

  • Thorsten Lill

    • Lam Research

  • Youn-Jin Oh

    • Lam Research

  • Mark Wilcoxson

    • Lam Research

  • Harmeet Singh

    • Lam Research
    • Lam Research Corporation

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• Digital Twins for Plasma-Surface Interactions in Atomic Layer Etching

  ORAL

  Oct. 1, 2024, 10:30 AM – Oct. 1, 2024, 10:45 AM

  Presenters

  • David Barry Graves

    • Chemical & Biological Engineering Princeton University
    • Princeton University

  Authors

  • David Barry Graves

    • Chemical & Biological Engineering Princeton University
    • Princeton University

  • Joseph R Vella

    • TEL Technology Center, America

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• Effect of Secondary Electron Emission on Surface Charging during Plasma Etching for Microelectronics Fabrication

  ORAL

  Oct. 1, 2024, 10:45 AM – Oct. 1, 2024, 11:00 AM

  Presenters

  • Chenyao Huang

    • University of Michigan

  Authors

  • Chenyao Huang

    • University of Michigan

  • Steven C Shannon

    • North Carolina State University

  • Mark Jay Kushner

    • University of Michigan

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• Process Control of Plasma Etching of SiN, SiO₂ and poly-Si films via Enhanced Fragmentation of CHF₂CF₃ and CF₃CH₃, CHF₂CH₃

  ORAL

  Oct. 1, 2024, 11:00 AM – Oct. 1, 2024, 11:15 AM

  Presenters

  • Trung Nguyen Tran

    • Nagoya University

  Authors

  • Trung Nguyen Tran

    • Nagoya University

  • Toshio Hayashi

    • Nagoya University

  • Hiroshi Iwayama

    • UVSOR Sychrotron Facility

  • Shih-Nan Hsiao

    • Nagoya university

  • Makoto Sekine

    • Nagoya University

  • Masaru Hori

    • Center for Low-temperature Plasma Sciences, Nagoya University, Japan
    • Nagoya University

  • Kenji Ishikawa

    • Center for Low-temperature Plasma Sciences, Nagoya University, Japan
    • Nagoya University, Japan

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• Characterization and Effects of Fluorine-Containing Ionic Liquid Ion Beams on Metal-Coated Substrates

  ORAL

  Oct. 1, 2024, 11:15 AM – Oct. 1, 2024, 11:30 AM

  Presenters

  • Nazli Turan

    • University of Southampton

  Authors

  • Nazli Turan

    • University of Southampton

  • Charlie Ryan

    • University of Southampton

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• Extraction and Transport of Positive and Negative Ions in Plasma Etch Applications

  ORAL

  Oct. 1, 2024, 11:30 AM – Oct. 1, 2024, 11:45 AM

  Presenters

  • Sergey Voronin

    • TEL Technology Center
    • TEL TECHNOLOGY CENTER, AMERICA, LLC

  Authors

  • Sergey Voronin

    • TEL Technology Center
    • TEL TECHNOLOGY CENTER, AMERICA, LLC

  • Nicholas Smieszek

    • TEL TECHNOLOGY CENTER, AMERICA, LLC

  • Carl Lynwood Smith

    • TEL TECHNOLOGY CENTER, AMERICA, LLC

  • Qi Wang

    • TEL TECHNOLOGY CENTER, AMERICA, LLC

  • Akiteru Ko

    • TEL TECHNOLOGY CENTER, AMERICA, LLC

  View abstract →