Plasma Diagnostics V

Presentations

• Measurements of plasma parameters in a semiconductor processing reactor

  ORAL · Invited

  Oct. 3, 2024, 4:00 PM – Oct. 3, 2024, 4:30 PM

  Presenters

  • Andrei Khomenko

    • Applied Materials

  Authors

  • Andrei Khomenko

    • Applied Materials

  • Santosh Kondeti

    • Princeton Plasma Physics Laboratory

  • Leonid Dorf

    • Applied Materials

  • Yevgeny Raitses

    • Princeton Plasma Physics Laboratory
    • Princeton Plasma Physics Laboratory (PPPL)

  • Evgeny Kamenetskiy

    • Applied Materials

  • Viacheslav Plotnikov

    • Applied Materials

  View abstract →

• Experimental study of intermediate-Pressure RF-CCP in Ar-O₂ mixtures

  ORAL

  Oct. 3, 2024, 4:30 PM – Oct. 3, 2024, 4:45 PM

  Publication: [1] M.A. Lieberman and A.J. Lichtenberg, Principles of Plasma Discharges and Materials Processing, 1st ed. (Wiley, 2005).
  [2] J.-P. Booth, O. Guaitella, S. Zhang, D. Lopaev, S. Zyryanov, T. Rakhimova, D. Voloshin, A. Chuka-lovsky, A. Volynets, and Y. Mankelevich, Plasma Sources Sci. Technol. 32, 095016 (2023).

  Presenters

  • Shu Zhang

    • Lpp, Ecole Polytechnique

  Authors

  • Shu Zhang

    • Lpp, Ecole Polytechnique

  • Garrett Curley

    • LPP-CNRS, Ecole Polytechnque, Palaiseau, France

  • Jean-Paul Booth

    • LPP-CNRS
    • The French National Centre for Scientific Research (CNRS)

  View abstract →

• Quantitative measurements of atomic oxygen using hybrid fs/ps CARS

  ORAL

  Oct. 3, 2024, 4:45 PM – Oct. 3, 2024, 5:00 PM

  Presenters

  • Timothy Chen

    • Applied Materials, Inc.

  Authors

  • Timothy Chen

    • Applied Materials, Inc.

  • Christopher J Kliewer

    • Sandia National Lab, Livermore, CA
    • Sandia National Laboratories

  View abstract →

• Spectroscopy of rubidium Rydberg states in inert buffer gases

  ORAL

  Oct. 3, 2024, 5:00 PM – Oct. 3, 2024, 5:15 PM

  Publication: Phys. Rev. Applied 21, 064004

  Presenters

  • Bineet K Dash

    • University of Michigan, Ann Arbor

  Authors

  • Bineet K Dash

    • University of Michigan, Ann Arbor

  • Eric G Paradis

    • Eastern Michigan Univ

  • Nithiwadee Thaicharoen

    • Chiang Mai Univ

  • Alisher Duspayev

    • University of Michigan

  • Georg A Raithel

    • University of Michigan

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• A two-color heterodyne interferometer for high-speed measurement of electron density in partially ionized gases and plasma

  ORAL

  Oct. 3, 2024, 5:15 PM – Oct. 3, 2024, 5:30 PM

  Presenters

  • Rishav Choudhary

    • University of Michigan - Ann Arbor

  Authors

  • Rishav Choudhary

    • University of Michigan - Ann Arbor

  • Bilal Hassan

    • University of Michigan
    • University of Michigan - Ann Arbor

  • Kaeshav Chandrasekar

    • University of Michigan - Ann Arbor

  • Tyler Linfesty

    • University of Michigan
    • University of Michigan - Ann Arbor

  • Christopher M Limbach

    • University of Michigan

  • Yue Wu

    • Metro Lasers Inc.

  • Jacob George

    • Metro Lasers Inc.

  View abstract →