Discharge Plasma III

Presentations

• Uniformity control in multi-electrode capacitive RF plasmas

  ORAL · Invited

  Oct. 3, 2024, 1:30 PM – Oct. 3, 2024, 2:00 PM

  Presenters

  • Li Wang

    • Ruhr University Bochum
    • Ruhr-University Bochum

  Authors

  • Li Wang

    • Ruhr University Bochum
    • Ruhr-University Bochum

  • Peter Hartmann

    • Wigner Research Center for Physics

  • Zoltan Donko

    • Wigner Research Center for Physics
    • Institute for Solid State Physics and Optics HUN-REN Wigner Research Centre for Physics, Budapest, Hungary
    • Wigner Research Center

  • Yuan-Hong Song

    • Dalian University of Technology

  • Julian Schulze

    • Ruhr-University Bochum

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• On the connection between the self-sputter yield and deposition rate in high power impulse magnetron sputtering

  ORAL

  Oct. 3, 2024, 2:00 PM – Oct. 3, 2024, 2:15 PM

  Publication: [1] J. T. Gudmundsson, Plasma Sources Science and Technology, 29(11) (2020) 113001
  [2] J. T. Gudmundsson et al., Journal of Vacuum Science and Technology A, 30(3) (2012) 030801
  [3] J. T. Gudmundsson et al., Surface and Coatings Technology, 442 (2022) 128189
  [4] Swetha Suresh Babu et al., Plasma Sources Science and Technology, 31(6) (2022) 065009
  [5] H. Eliasson et al., Plasma Sources Science and Technology, 30(11) (2021) 115017
  [6] K. Barynova et al., Plasma Sources Science and Technology, submitted for publication

  Presenters

  • Jon T Gudmundsson

    • University of Iceland

  Authors

  • Jon T Gudmundsson

    • University of Iceland

  • Kateryna Barynova

    • University of Iceland

  • Martin Rudolph

    • Leibniz Institute of Surface Engineering (IOM)

  • Swetha Suresh Babu

    • University of Iceland

  • Joel Fischer

    • Linkoping University

  • Michael A Raadu

    • KTH Royal Institute of Technology

  • Nils Brenning

    • KTH Royal Institute of Technology

  • Daniel Lundin

    • Linkoping University

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• Measuring electron temperature temporal oscillations in an electrodeless thruster using floating harmonic probe techniques

  ORAL

  Oct. 3, 2024, 2:15 PM – Oct. 3, 2024, 2:30 PM

  Presenters

  • Federico Boni

    • ONERA
    • Physics Instrumentation and Space Department, ONERA, Université Paris-Saclay, 91123 Palaiseau, France

  Authors

  • Federico Boni

    • ONERA
    • Physics Instrumentation and Space Department, ONERA, Université Paris-Saclay, 91123 Palaiseau, France

  • Victor Désangles

    • Physics Instrumentation and Space Department, ONERA
    • Physics Instrumentation and Space Department, ONERA, Université Paris-Saclay, 91123 Palaiseau, France

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• Modeling of ECR plasma discharges in hydrogen with an electromagnetic PIC code

  ORAL

  Oct. 3, 2024, 2:30 PM – Oct. 3, 2024, 2:45 PM

  Presenters

  • Denis Eremin

    • Ruhr University Bochum

  Authors

  • Denis Eremin

    • Ruhr University Bochum

  • Efe Kemaneci

    • ASML

  • Luuk Heijmans

    • ASML

  • Andrei M Yakunin

    • ASML

  • Ralf Peter Brinkmann

    • Ruhr Univ Bochum
    • Ruhr University Bochum

  • Mark van de Kerkhof

    • ASML

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• Electron-beam generated ExB plasmas and their applications: user and host team research projects at Princeton Collaborative Research Facility

  ORAL

  Oct. 3, 2024, 2:45 PM – Oct. 3, 2024, 3:00 PM

  Publication: [1] S. G. Walton et al., ECS J. Solid State Sci. Technol. 4 N5033 (2015)
  [2] C. Pederson et al., Phys. Rev. Mater. 8, 036201 (2024)
  [3] N. S. Chopra et al., Appl. Phys. Lett. 124, 064101 (2024).
  [4] H. Sun et al., Phys. Rev. Lett. 129, 125001 (2022)
  [5] S. Yatom et al., Plasma Sources Sci. Technol. 32, 115005 (2023)
  [6] F. Zhao et al., Carbon, 117, 244 (2021)

  Presenters

  • Yevgeny Raitses

    • Princeton Plasma Physics Laboratory
    • Princeton Plasma Physics Laboratory (PPPL)

  Authors

  • Yevgeny Raitses

    • Princeton Plasma Physics Laboratory
    • Princeton Plasma Physics Laboratory (PPPL)

  • Shurik Yatom

    • Princeton Plasma Physics Laboratory

  • Nirbhav S Chopra

    • Princeton Plasma Physics Laboratory

  • Santosh Kondeti

    • Princeton Plasma Physics Laboratory

  • Arthur Dogariu

    • Texas A&M University and Princeton University
    • Princeton University and Texas A&M University
    • Princeton University
    • Texas A&M University College Station

  • Igor D Kaganovich

    • Princeton Plasma Physics Laboratory

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• Mapping electron density with laser-collision induced fluorescence in a helium capacitively coupled radio-frequency plasma

  ORAL

  Oct. 3, 2024, 3:00 PM – Oct. 3, 2024, 3:15 PM

  Presenters

  • Brian Z Bentz

    • Sandia National Laboratories

  Authors

  • Brian Z Bentz

    • Sandia National Laboratories

  • Kevin Youngman

    • Sandia National Laboratories

  • Peter Hartmann

    • Wigner Research Center for Physics

  • Aranka Derzsi

    • Wigner Research Center for Physics

  • Zoltan Donko

    • Wigner Research Center for Physics
    • Institute for Solid State Physics and Optics HUN-REN Wigner Research Centre for Physics, Budapest, Hungary
    • Wigner Research Center

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• Investigation of Plasma Characteristics in VHF Capacitive Discharges Operated at Extremely Low Pressures and High Voltages (kV Range)

  ORAL

  Oct. 3, 2024, 3:15 PM – Oct. 3, 2024, 3:30 PM

  Presenters

  • Andrew Tasman Powis

    • Princeton Plasma Physics Laboratory
    • Princeton Plasma Physics Laboratory, Princeton, USA

  Authors

  • Sarveshwar Sharma

    • Institute for Plasma Research

  • Andrew Tasman Powis

    • Princeton Plasma Physics Laboratory
    • Princeton Plasma Physics Laboratory, Princeton, USA

  • Igor D Kaganovich

    • Princeton Plasma Physics Laboratory

  View abstract →